MEMS Cap Segmentation for Adjustable Field of View
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing MEMS devices lack sufficient adjustability in the distance between the cap's inner wall and the functional structure, which affects the Field of View (FoV) and detection sensitivity, particularly for infrared radiation applications.
Innovation Solution
A MEMS device design featuring a cap with a supporting and cover portion, where the cover portion has an inner wall that faces the functional structure, and a coating extending within the cavity to prevent reflection, allowing for adjustable distance and enhanced sensitivity, along with a manufacturing process that enables independent formation of the cap components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a monolithic cap is used in known MEMS devices, then the structure is simple and easy to manufacture, but the distance between the inner wall and the functional structure cannot be sufficiently regulated for specific applications
Solution Approach 1:
The cap is divided into two separate components: a first cap component and a second cap component. The first cap component includes a first cavity and a first inner wall, while the second cap component includes a second cavity and a second inner wall. This segmentation allows independent regulation of the distance between the inner walls and the functional structure, enabling adjustment of the Field of View for different applications while maintaining manufacturing simplicity through separate component fabrication.
2Adaptability or versatility
If the distance between the inner wall and the functional structure is increased to improve Field of View, then the FoV is enlarged, but the detection sensitivity for infrared radiation decreases
Solution Approach 1:
The patent provides a configurable cap structure where the distance between the inner walls and the functional structure can be dynamically adjusted based on application requirements. The first and second cap components can be positioned at different distances from the functional structure, allowing optimization of either Field of View or detection sensitivity depending on the specific application scenario, rather than being fixed in a single configuration.
3Reliability
If a coating is added to the inner wall to prevent reflection, then detection sensitivity is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The cap is segmented into separate first and second cap components, each with its own cavities and inner walls. This segmentation allows the coating to be applied independently to each inner wall surface during the manufacturing process, simplifying the overall manufacturing complexity compared to coating a single monolithic cap structure, while still achieving the desired reflection prevention for improved detection sensitivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design provides high versatility and improved detection performance by allowing precise adjustment of the FoV and increased sensitivity, suitable for various applications including temperature detection and mobile devices.
Implementation Method 1
a first coating extending within the first cavity on the inner wall of the cover portion
Data Source
AI summary
The MEMS device has: a sensor body having a functional structure configured to transduce a physical or chemical quantity into a corresponding electrical quantity; and a cap bonded to the sensor body and having a first cavity overlying the functional structure. The cap has a supporting portion and a cover portion that form the first cavity. The supporting portion is bonded to the sensor body. The cover portion is bonded to the supporting portion and has an inner wall delimiting on a side the first cavity and facing the functional structure. The MEMS device further has a first coating that extends within the first cavity on the inner wall of the cover portion.