Overhanging MEMS Cavity Support Structure for Resonance Reduction

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Solution Overview

Problem

There is a need for MEMS structures that can be readily constructed and integrated into electronic systems with improved performance, particularly in reducing unwanted resonance modes.

Innovation Solution

The overhanging device cavity structure features a substrate with a cavity divided by a support, where a device is placed on or in contact with the support and extends into the cavity, allowing for reduced resonance modes by affixing the resonator at the center of the device to the support, using materials like piezoelectric materials and electrodes, and employing anisotropically etchable substrates for cavity formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If solidly mounted beams or anchored MEMS structures are used, then structural stability is improved, but unwanted resonance modes are generated

Engineering Contradiction:

Improvestructural stabilityVSAvoidunwanted resonance modes

Core Design Contradiction:

Stability of the object's compositionVSObject-generated harmful factors

Solution Approach 1:

The support structure is divided into multiple discrete supports rather than a single continuous anchor. Each support is independently connected to the substrate, segmenting the mechanical path and reducing the propagation of resonance modes while maintaining structural stability through distributed support points.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent introduces an intermediate support structure between the device and the substrate. This intermediary support layer decouples the device from direct mechanical coupling with the substrate, allowing structural stability to be maintained while reducing the transmission of unwanted resonance modes generated by solidly mounted beams.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Power

If piezoelectric materials and electrodes are used, then signal processing capabilities are improved, but device complexity increases

Engineering Contradiction:

Improvesignal processing capabilitiesVSAvoiddevice complexity

Core Design Contradiction:

PowerVSDevice complexity

Solution Approach 1:

The support structure serves multiple functions: it provides mechanical support, enables signal processing through piezoelectric materials, and facilitates electrical connectivity through integrated electrodes. This multi-functionality reduces the need for separate components, thereby managing device complexity while enhancing signal processing capabilities.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines the support structure, piezoelectric materials, and electrodes into an integrated assembly. By merging these elements into a unified structure rather than separate components, the device achieves enhanced signal processing capabilities while minimizing the increase in device complexity through consolidated design.

Inventive Principle:

Principle #5Merging (Combining)

3Manufacturing precision

If anisotropically etchable substrates are used for cavity formation, then manufacturing precision is improved, but manufacturing process complexity increases

Engineering Contradiction:

Improvecavity formation precisionVSAvoidmanufacturing process complexity

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent utilizes the anisotropic etching properties of crystalline substrates by controlling etching parameters such as etchant composition, temperature, and orientation. This allows precise cavity formation with controlled sidewall angles and depths, achieving high manufacturing precision while managing process complexity through parameter optimization rather than additional process steps.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the construction of MEMS structures with superior performance by reducing unwanted resonance modes and facilitating integration into electronic systems at a lower cost, with enhanced signal processing capabilities.

Implementation Method 1

The device can comprise a piezoelectric material and can be a piezo-electric device

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The device comprises a top electrode disposed on a device top surface opposite a bulk of the substrate and a bottom electrode disposed on a device bottom surface adjacent a bulk of the substrate

Methodology Applied

Scientific EffectElectromechanical transduction: Electromechanical Film

Implementation Method 3

employing anisotropically etchable substrates for cavity formation

Methodology Applied

Scientific EffectAnisotropic etching:

Data Source

PatentUS12043541B2Overhanging device structures and related methods of manufacture

Publication Date: 2024.07.23 X CELEPRINT LIMITED

AI summary

A overhanging device cavity structure comprises a substrate and a cavity disposed in or on the substrate. The cavity comprises a first cavity side wall and a second cavity side wall opposing the first cavity side wall on an opposite side of the cavity from the first cavity side wall. A support extends from the first cavity side wall to the second cavity side wall and at least partially divides the cavity. A device is disposed on, for example in direct contact with, the support and extends from the support into the cavity.