MEMS Charge-Pump Voltage Converter With Rotating Rotor
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Solution Overview
Problem
Traditional charge-pump voltage converter designs are not compatible with the small dimensional scale of microelectromechanical systems (MEMS) devices, making it difficult to produce moderate voltages from low-voltage inputs.
Innovation Solution
A charge-pump voltage converter that uses a rotating rotor electrode and stator electrode configuration to inductively generate and transfer charge, allowing for the buildup of voltage in a capacitor, with optional shield configurations and multiple electrodes to enhance efficiency and output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If traditional charge-pump voltage converter designs are used, then voltage conversion can be achieved, but the device size is too large for MEMS applications
Solution Approach 1:
The charge pump is divided into multiple discrete electrodes (inductor electrodes, transfer electrodes, charge-receiving electrodes) arranged in segments around the rotor perimeter. Each electrode performs a specific function in the charge transfer cycle, allowing the system to achieve high voltage conversion in a compact, modular configuration that fits MEMS scale requirements.
Solution Approach 2:
The patent transitions from planar electrode arrangements to a three-dimensional cylindrical configuration with electrodes distributed around the rotor perimeter. This spatial arrangement in multiple dimensions enables efficient charge pumping while minimizing the overall device footprint, making it compatible with MEMS dimensional constraints.
2Volume of moving object
If microscale components are used to reduce size, then device compactness is achieved, but surface contaminant barriers prevent effective charge transfer
Solution Approach 1:
A voltage spike is generated before the main charge transfer operation to break through surface contaminants. This preliminary action removes the contaminant barrier that would otherwise prevent effective charge transfer, ensuring that the microscale electrodes can function properly despite surface contamination issues.
Solution Approach 2:
The voltage spike mechanism converts the harmful effect of surface contaminants into a beneficial cleaning action. By applying a high-voltage spike that breaks through the contaminant layer, the system actually uses the contaminant presence as an indicator to trigger a cleaning event, transforming the problem into a self-correcting feature.
3Power
If multiple electrodes and shield configurations are added to enhance efficiency, then voltage output is improved, but device complexity increases
Solution Approach 1:
The rotor structure serves multiple functions simultaneously: it supports the inductor electrodes for charge induction, carries the transfer electrodes for charge movement, and provides mechanical rotation for sequential electrode positioning. This multi-functionality reduces the need for separate components, maintaining relatively simple device architecture while achieving high voltage output through coordinated electrode operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the production of high voltages (up to several kilovolts) and currents in a compact, microscale package suitable for MEMS applications, overcoming size limitations and surface contaminant barriers.
Implementation Method 1
Charge is inductively generated on a transfer rotor electrode during its transit past an inductor stator electrode
Implementation Method 2
subsequently transferred by the rotating rotor to a collector stator electrode for storage or use
Data Source
AI summary
A charge-pump voltage converter for converting a low voltage provided by a low-voltage source to a higher voltage. Charge is inductively generated on a transfer rotor electrode during its transit past an inductor stator electrode and subsequently transferred by the rotating rotor to a collector stator electrode for storage or use. Repetition of the charge transfer process leads to a build-up of voltage on a charge-receiving device. Connection of multiple charge-pump voltage converters in series can generate higher voltages, and connection of multiple charge-pump voltage converters in parallel can generate higher currents. Microelectromechanical (MEMS) embodiments of this invention provide a small and compact high-voltage (several hundred V) voltage source starting with a few-V initial voltage source. The microscale size of many embodiments of this invention make it ideally suited for MEMS- and other micro-applications where integration of the voltage or charge source in a small package is highly desirable.


