MEMS Comb Drive Actuator for Space-Constrained Optoelectronic Devices
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Solution Overview
Problem
Existing MEMS actuators are not suitable for space-constrained applications, such as miniature cameras, due to their size and complexity, and lack the ability to move optoelectronic devices with multiple electrical inputs and outputs effectively.
Innovation Solution
The use of comb drive actuators with electrically conductive spring elements and MEMS processes to create a compact, precise, and power-efficient actuator that can move a platform with electrical connections, enabling optical image stabilization and auto-focus capabilities in space-constrained environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional piezoelectric actuators are used to move an optoelectronic device, then the actuator can provide the required force and precision, but the actuator becomes large and unsuitable for space-constrained applications
Solution Approach 1:
The patent replaces conventional mechanical actuators (piezoelectric actuators) with a MEMS-based electrostatic comb drive actuator. This substitution enables the system to achieve the required actuation force and precision while dramatically reducing the actuator size to fit within space-constrained applications such as smartphone cameras.
Solution Approach 2:
The patent changes the actuation mechanism from piezoelectric effect to electrostatic comb drive actuation. By utilizing electrostatic forces between interdigitated comb fingers, the system achieves comparable force output with significantly reduced size, enabling integration into miniature devices while maintaining reliability for moving optoelectronic components.
2Volume of moving object
If MEMS actuators are used to move passive components in miniature cameras, then the actuator achieves miniaturization, but the actuator cannot move optoelectronic devices with multiple electrical inputs and outputs
Solution Approach 1:
The patent designs the MEMS actuator with multi-functional capabilities: it can move both passive optical components and optoelectronic devices with electrical connections. The actuator achieves this universality by integrating electrical contact pads on the movable platform that can establish electrical connections with external circuits, enabling it to handle various device types including image sensors and lenses.
Solution Approach 2:
The patent segments the actuator into distinct functional components: a movable platform with electrical contact pads, support structures, and actuation mechanisms. This segmentation allows the electrical connection system to be independently designed and integrated, enabling the actuator to move optoelectronic devices while maintaining electrical connectivity.
3Adaptability or versatility
If deployment mechanisms are added to MEMS actuators to enable movement of optoelectronic devices, then the actuator gains functionality, but the actuator increases in complexity, size, and cost
Solution Approach 1:
The patent merges the actuation mechanism and electrical connection system into a single integrated MEMS structure. The electrical contact pads are fabricated as part of the movable platform, eliminating the need for separate deployment mechanisms. This integration reduces complexity while maintaining the ability to move optoelectronic devices with electrical connections.
Solution Approach 2:
The MEMS actuator structure serves multiple functions simultaneously: the movable platform provides both mechanical actuation and electrical connectivity. The electrical contact pads are self-integrated into the moving structure, eliminating the need for external deployment mechanisms and reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a highly miniaturized, precise, and power-efficient actuator suitable for smartphones and other space-constrained devices, achieving effective optical image stabilization and auto-focus with reduced size, power consumption, and cost.
Implementation Method 1
one or more comb drive actuators that apply a controlled force between an inner frame and an outer frame
Implementation Method 2
The spring elements in this embodiment are electrically conductive... the spring elements route electrical signals between the outer frame and the inner frame
Data Source
AI summary
An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.