MEMS Cooling Exit Channel Layout for Compact Heat Removal
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Solution Overview
Problem
Existing cooling solutions for computing devices, such as fans and heat spreaders, are inadequate for both mobile and larger devices due to space and power limitations, leading to inefficiencies in heat management and performance throttling.
Innovation Solution
A MEMS-based cooling system with a centrally anchored cooling element that undergoes vibrational motion to drive fluid towards a heat-generating structure, utilizing a support structure, cooling element, and bottom plate with orifices and cavities to enhance heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If traditional active cooling devices such as fans are used, then cooling capability is improved, but device size and power consumption increase
Solution Approach 1:
The patent employs a piezoelectric actuator to generate ultrasonic vibrations in a diaphragm, creating acoustic waves that drive fluid flow through the cooling system. This mechanical vibration approach replaces traditional fan-based active cooling, achieving effective heat removal without requiring large moving components, thus resolving the contradiction between cooling capability and device size
Solution Approach 2:
The invention substitutes the mechanical fan system with an acoustic field generated by piezoelectric actuation. The acoustic waves create fluid motion and enhance heat transfer through acoustic streaming and cavitation effects, eliminating the need for traditional mechanical rotating components and significantly reducing device volume while maintaining cooling effectiveness
2Temperature
If traditional active cooling devices such as fans are used, then cooling capability is improved, but power consumption increases
Solution Approach 1:
The piezoelectric actuator operates at ultrasonic frequencies to generate acoustic waves that drive fluid circulation and enhance convective heat transfer. This vibration-based approach creates efficient heat removal mechanisms through acoustic streaming and forced convection, achieving effective cooling with lower power consumption compared to traditional fan systems
Solution Approach 2:
The patent utilizes acoustic cavitation, where ultrasonic waves create localized phase transitions in the fluid (formation and collapse of vapor bubbles). This cavitation process generates intense local mixing and heat transfer, significantly enhancing cooling efficiency and reducing the overall power required for effective thermal management
3Temperature
If cooling solutions are incorporated into computing devices, then heat management is improved, but device complexity increases
Solution Approach 1:
The patent integrates the piezoelectric actuator, orifice plate, and fluid channels into a single compact cooling module that can be directly mounted on heat-generating components. This merged design consolidates multiple functions (actuation, flow control, and heat transfer) into one integrated unit, reducing overall system complexity while improving heat management efficiency
Solution Approach 2:
The orifice plate serves as an intermediary component that translates acoustic wave energy into directed fluid flow. By positioning the orifice plate between the piezoelectric actuator and the heat-generating structure, the system efficiently converts acoustic energy into useful convective flow, simplifying the coupling between the actuator and thermal management functions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively cools heat-generating structures with high fluid speeds and minimal power consumption, suitable for devices with limited space, reducing thermal throttling and improving performance.
Implementation Method 1
an actuator, such as a piezoelectric, may be coupled to the diaphragm
Implementation Method 2
the diaphragm undergoes vibrational motion when actuated to drive a fluid toward a heat-generating structure
Implementation Method 3
Ultrasonic Vibration
Data Source
AI summary
A cooling system including a support structure, a cooling element, and a bottom plate is described. The cooling element has a central region and a perimeter. The cooling element is supported by the support structure at the central region. At least a portion of the perimeter is unpinned. The cooling element undergoes vibrational motion when actuated to drive a fluid toward a heat-generating structure. The bottom plate has orifices and at least one cavity therein. The at least one cavity is adjacent to and fluidically connected with the orifices. The at least one cavity and the orifices define an orifice distance between the orifices and the heat-generating structure and an orifice length within the bottom plate. The heat-generating structure and the bottom plate define a gap between a portion of the bottom plate and a portion of the heat-generating structure.