MEMS Diaphragm Axis-Symmetrical Pattern for Uniform Vibration
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Solution Overview
Problem
Current MEMS electroacoustic transducers experience non-uniform diaphragm vibration due to mismatched sound wave patterns, leading to poor performance.
Innovation Solution
The implementation of axis-symmetrical or spiral pattern layers on the diaphragm, such as wheel-like, spiderweb-like, or snowflake-like patterns, which match the sound wave pattern for uniform vibration, along with an outer frame and sealing agent for structural strength and air-tightness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If a pattern layer consisting of separate mesh patterns is used on the diaphragm, then the diaphragm structure is formed, but the vibration uniformity deteriorates due to mismatch with sound wave patterns
Solution Approach 1:
The patent applies axis-symmetrical patterns (such as radial, concentric, or combination patterns) that match the natural propagation pattern of sound waves. This symmetry alignment ensures uniform vibration distribution across the diaphragm surface, resolving the contradiction between having a structured pattern layer and achieving uniform vibration.
2Ease of manufacture
If the diaphragm pattern does not match the sound wave pattern, then the diaphragm can be manufactured, but the transducer performance deteriorates due to non-uniform vibration
Solution Approach 1:
The patent changes the geometric parameters of the pattern layer (using axis-symmetrical configurations such as radial lines from center, concentric circles, or combinations) to match the sound wave propagation characteristics. This parameter optimization maintains ease of manufacturing through standard photolithography while significantly improving vibration uniformity and transducer performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves uniform vibration and enhances the performance of MEMS electroacoustic transducers by aligning the diaphragm pattern with sound wave patterns, improving vibration consistency and overall device performance.
Implementation Method 1
These patterns in the pattern layer may not match the pattern of the sound wave, which may cause the vibration of the diaphragm to be non-uniform
Implementation Method 2
the diaphragm can produce vibration with good uniformity
Data Source
AI summary
A diaphragm of an MEMS electroacoustic transducer including a first axis-symmetrical pattern layer is provided. Because the layout of the first axis-symmetrical pattern layer can match the pattern of the sound wave, the vibration uniformity of the diaphragm can be improved.