MEMS Diaphragm Non-Uniform Pillar Distribution
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Solution Overview
Problem
Current MEMS diaphragm assemblies face challenges in maximizing acoustic and electric effective areas, which are crucial for performance and sensitivity, as increasing acoustic effective area decreases damping and increasing electric effective area enhances sensitivity and capacitance.
Innovation Solution
A MEMS diaphragm assembly with a non-uniform pillar distribution, where the pillar density is higher at the geometric center than at the outer periphery, allowing for a higher acoustic and electric effective area by optimizing pillar spacing and cross-sectional area distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If pillars are uniformly distributed across the diaphragm assembly, then manufacturing is simplified, but acoustic and electric effective areas are reduced
Solution Approach 1:
The patent applies local quality by varying the spatial distribution density of pillars across different regions of the diaphragm assembly. Specifically, the central region has a higher pillar distribution density while the peripheral region has a lower density, optimizing acoustic and electric effective areas locally in each region rather than using a uniform distribution throughout.
2Quantity of substance
If pillar density is increased across the entire assembly, then electric effective area and sensitivity increase, but acoustic damping increases
Solution Approach 1:
The patent resolves this contradiction by applying local quality through spatially varying pillar density. The central region maintains high pillar density to provide sufficient electric effective area and sensitivity, while the peripheral region uses lower pillar density to minimize acoustic damping, thus optimizing both parameters simultaneously through localized differentiation.
3Area of moving object
If non-uniform pillar distribution is implemented, then acoustic and electric effective areas are maximized, but manufacturing precision requirements increase
Solution Approach 1:
The patent applies segmentation by dividing the diaphragm assembly into distinct regions (central region and peripheral region) with different pillar distribution characteristics. This segmentation allows each region to be optimized independently for its specific functional requirements while simplifying the overall manufacturing approach compared to continuous non-uniform distribution.
Solution Approach 2:
The patent resolves the manufacturing precision challenge by applying local quality through defined regional zones. The central region has higher pillar density with specific spacing characteristics, while the peripheral region has lower density with different spacing, allowing manufacturing processes to target specific regions with appropriate precision levels rather than requiring uniform high precision across the entire assembly.
Data Source
AI summary
A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm. A plurality of pillars connects the first and second diaphragms, wherein the plurality of pillars has a higher distribution density at a geometric center of the MEMS diaphragm assembly than at an outer periphery thereof.