MEMS Microphone Diaphragm Support Segmentation
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Solution Overview
Problem
MEMS microphones face limitations in sensitivity improvement due to the wide supporting beams, which restrict the deformation of the vibration diaphragm under external sound pressure, resulting in reduced sensitivity.
Innovation Solution
The design incorporates a capacitive structure with a vibration diaphragm supported by multiple zigzag-shaped spring structures and supporting beams, where each spring structure includes two beam arms extending along the peripheral edge, reducing the rigidity of the supporting beams and allowing for greater deformation under sound pressure, enhancing sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If wide supporting beams are used to support the vibration diaphragm, then the structural strength and stability are improved, but the deformation capability of the vibration diaphragm under external sound pressure deteriorates, limiting sensitivity improvement
Solution Approach 1:
The supporting beam is segmented into multiple narrow beams instead of a single wide beam. This segmentation reduces the overall rigidity while maintaining structural integrity, allowing the vibration diaphragm to deform more readily under sound pressure while still being adequately supported.
Solution Approach 2:
The supporting structure uses narrow beams with specific local characteristics (narrower width) rather than a uniformly wide beam. This local quality change reduces the restraining effect on the vibration diaphragm's deformation while maintaining necessary support functions.
2Stability of the object's composition
If narrow supporting beams are used to allow larger deformation of the vibration diaphragm, then the sensitivity is improved, but the structural strength and stability deteriorate
Solution Approach 1:
The support structure is divided into multiple narrow beams that collectively provide sufficient structural strength. Each individual narrow beam allows local deformation, while the ensemble of multiple beams maintains overall structural integrity and support capability.
Solution Approach 2:
Multiple narrow supporting beams are combined to work together as a unified support system. The collective strength of multiple narrow beams compensates for the reduced individual beam strength, maintaining overall structural stability while enabling greater diaphragm deformation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a larger deformation of the vibration diaphragm under external sound pressure, thereby improving the sensitivity of the MEMS microphone.
Implementation Method 1
two spring structures symmetrically arranged on both sides of the supporting beam and connecting the supporting beam and the main body respectively; each spring structure includes at least two zigzag-shaped beam arms
Data Source
AI summary
The present invention provides a MEMS microphone, including a substrate and a capacitive structure. The capacitive structure includes a back plate and a vibration diaphragm. The vibration diaphragm includes a main body and a plurality of supporting structures for supporting the main body. Each supporting structure includes a supporting beam and two spring structures. Each spring structure includes at least two beam arms extending along the extension direction of the peripheral edge of the main body, and the beam arm closest to the main body is spaced apart from the main body. The sensitivity of the MEMS microphone in the present invention is higher.