MEMS Diaphragm Support Structure for Shock Resistance
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Solution Overview
Problem
MEMS devices with diaphragms are prone to damage and fracture from mechanical shocks, airburst events, and drops due to excessive bending, which can lead to critical failure.
Innovation Solution
Incorporating a support structure that extends partially or fully across the aperture of the substrate, providing structural support between the diaphragm and the aperture to absorb and distribute mechanical stimuli, thereby reducing diaphragm flexure and potential damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the diaphragm is made larger to improve sensing area, then the sensing capability is improved, but the diaphragm becomes more susceptible to damage from mechanical shocks and airburst events
Solution Approach 1:
The support structure divides the aperture into multiple regions by extending support beams across it, creating segmented zones that distribute mechanical stress. This segmentation allows the diaphragm to maintain a large sensing area while the support structure prevents excessive bending in any single region during shock events.
Solution Approach 2:
The device combines the diaphragm material with a support structure made of structurally stronger material, creating a composite system. The diaphragm maintains its sensing functionality while the support structure provides mechanical reinforcement, allowing the system to achieve both large area and high reliability.
2Measurement precision
If the diaphragm is made thinner to improve sensitivity, then the sensing sensitivity is improved, but the diaphragm becomes more prone to fracture under mechanical stress
Solution Approach 1:
The support structure acts as an intermediary element between the thin diaphragm and the substrate. It provides mechanical support to the thin diaphragm, distributing the mechanical stress that would otherwise concentrate on the fragile thin structure, thereby preventing fracture while maintaining sensitivity.
Solution Approach 2:
The support structure is positioned strategically beneath the diaphragm at locations where mechanical stress concentrates during shock events. This local reinforcement provides strength exactly where needed, allowing the diaphragm to remain thin and sensitive overall while being protected at critical stress points.
3Reliability
If the support structure extends fully across the aperture, then the structural support is maximized, but the acoustic performance may be degraded
Solution Approach 1:
Instead of extending the support structure fully across the entire aperture, it is positioned to extend only partially, covering the regions where mechanical support is most critical. This partial action provides sufficient structural reinforcement to prevent diaphragm failure while leaving enough of the aperture open to maintain acoustic performance.
Solution Approach 2:
The support structure is concentrated in specific locations where mechanical stress is highest during shock events, rather than being distributed uniformly across the entire aperture. This localized support provides maximum structural benefit with minimum impact on acoustic performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The support structure enhances the durability of the MEMS device by allowing the diaphragm to withstand extreme mechanical stimuli without fracturing, ensuring the device's functionality is maintained after such events and providing structural integrity to the entire MEMS device.
Implementation Method 1
the support structure can be located between the diaphragm and the aperture... providing structural support between the diaphragm and the aperture to absorb and distribute mechanical stimuli
Data Source
AI summary
A MEMS can include a substrate including a first side and a second side on an opposite side of the substrate from the first side. The MEMS device can include an aperture running through the substrate from the first side to the second side. The substrate can have an edge surrounding the aperture on the first side. The MEMS device can include a diaphragm located over the aperture on the first side. The MEMS device can include a support structure that extends at least partially across the aperture from the edge.