MEMS Movable Element with Differential Gaps for Shock Protection
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Solution Overview
Problem
MEMS devices are prone to damage from shock loads and external fluidic pressure due to unintentional contact between electronic elements, leading to potential damage and particle generation.
Innovation Solution
A MEMS device design with a movable element featuring different gap distances along a disturbance direction, allowing for a contact region that acts as a stop, preventing contact between elements and protecting electronic components, while maintaining a compact design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a compact MEMS device design is used, then device size is reduced and mass is decreased, but electronic elements become more susceptible to unintentional contact under shock loads
Solution Approach 1:
The device is segmented into distinct functional regions: a contact region where the movable element can safely contact the further element under shock loads, and a protection region where electronic elements are positioned to avoid contact. This spatial segmentation allows the device to be compact while protecting sensitive components.
Solution Approach 2:
The contact region acts as an intermediary zone between the movable element and electronic elements. Under normal operation, the movable element operates in this region, and under shock loads, it can contact the further element in this region without damaging electronic components, thus mediating the impact protection.
2Reliability
If additional protection elements are added to prevent unintentional contact, then reliability under shock loads is improved, but device complexity and mass increase
Solution Approach 1:
The further element serves multiple functions: it forms part of the device structure, defines the contact region boundary, and acts as a protective stop for the movable element under shock loads. This multi-functionality eliminates the need for separate protection elements, reducing device complexity.
Solution Approach 2:
The protection function is merged into the existing device structure by positioning electronic elements in the protection region and using the further element as both a structural component and a protective barrier. This integration avoids adding separate protection mechanisms.
3Reliability
If gap distances are increased to prevent contact under shock loads, then protection is improved, but device volume and mass increase
Solution Approach 1:
Different gap distances are used in different regions of the device. The first gap distance in the contact region is smaller, allowing compact design, while the second gap distance in the protection region is larger, providing protection under shock loads. This local differentiation optimizes both compactness and protection.
4Device complexity
If a single uniform gap distance is used, then device design is simplified, but protection under shock loads is insufficient
Solution Approach 1:
The device employs different gap distances in different regions: a first gap distance for the contact region and a second, larger gap distance for the protection region. This local quality differentiation ensures that the device remains simple in design while providing adequate protection under shock loads.
Data Source
AI summary
A MEMS device. The MEMS device includes at least one movably mounted element, which performs a useful movement along a useful direction relative to a further element of the MEMS device. The movable element is for interaction with a fluid, such as a gas or a liquid. The movable element includes first and second portions. The further includes further first and second portions. The first portion has a first gap distance from the further first portion in a disturbance direction of the movable element. The second portion has a second gap distance from the further second portion in the disturbance direction of the movable element. A movement of the movably mounted element along the disturbance direction is caused by an external load, such as an external impact. The first gap distance is smaller than the second gap distance. The first portion and the further first portion form a contact region between the movable element and the further element.