Discontinuous Passivation Layer for MEMS Electrical Components
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Solution Overview
Problem
Microelectromechanical systems (MEMS) devices face challenges in providing reliable protection for electrical components from external environmental factors such as humidity and chemicals, leading to potential short circuits, corrosion, and device failure due to the susceptibility of ceramic materials and passivation layers.
Innovation Solution
The implementation of a discontinuous passivation layer and intermediate layer in MEMS devices, which are partially isolated over intermediate regions between electrical elements, prevents cascading failure mechanisms and extends device lifetime by reducing chemical attack propagation while maintaining adequate electrical insulation and piezoelectric performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If continuous passivation layers are used to protect electrical elements, then chemical protection is improved, but cascading failure risk increases
Solution Approach 1:
The passivation layer is segmented into discrete regions, with each region associated with a specific electrical element. The passivation layer comprises multiple isolated segments rather than a continuous layer, preventing chemical attack from propagating across adjacent electrical elements while maintaining protection for each individual element
2Object-affected harmful factors
If thicker passivation layers are used to improve chemical protection, then protection effectiveness increases, but piezoelectric performance deteriorates
Solution Approach 1:
The passivation layer is provided only in regions where chemical protection is needed (overlying the electrical elements and intermediate regions), while leaving other areas without passivation to maintain piezoelectric performance. This local differentiation allows optimal protection without compromising the piezoelectric effect in active regions
3Object-affected harmful factors
If passivation layers are provided over intermediate regions, then chemical protection is improved, but electrical isolation between elements deteriorates
Solution Approach 1:
The passivation layer is segmented with discontinuities over the intermediate regions between adjacent electrical elements. These segmented regions provide chemical protection where needed while the discontinuities maintain electrical isolation between neighboring elements, preventing both chemical propagation and electrical interference
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively isolates individual electrical elements, reducing the risk of cascading failures and extending the operational life of MEMS devices by preventing chemical attacks and maintaining the performance of electrostrictive and piezoelectric components.
Implementation Method 1
provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements
Implementation Method 2
prevents cascading failure mechanisms and extends device lifetime by reducing chemical attack propagation
Implementation Method 3
a thin film of a ceramic material showing ferroelectric behaviour, for example a piezoelectric material
Implementation Method 4
first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation
Data Source
AI summary
The present invention relates to an electrical component for a microelectromechanical systems (MEMS) device, in particular, but not limited to, an electromechanical actuator. In one aspect, the present invention provides an electrical component for a microelectromechanical systems device comprising: i) a substrate layer; ii) a plurality of adjacent electrical elements arranged over the substrate layer, where each electrical element is separated from a neighbouring electrical element by an intermediate region, each of the plurality of electrical elements comprising: a) a ceramic member; and b) first and second electrodes disposed adjacent the ceramic member such that a potential difference may be established between the first and second electrodes and through the ceramic member during operation; iii) a passivation layer, or a laminate of multiple passivation layers, at least partially overlying each of the plurality of electrical elements so as to provide electrical passivation between the first and second electrodes of each of the plurality of electrical elements; wherein the passivation layer, or at least an innermost layer of the laminate of passivation layers which is disposed adjacent each underlying electrical element, is discontinuous over at least one intermediate region between neighbouring electrical elements of the electrical component.