MEMS Driver Circuit with Supply Tracked Common Mode Voltage

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Solution Overview

Problem

Conventional MEMS scanning mirror drivers using sinusoidal waveforms suffer from discontinuities (dead zones) at resonance, requiring frequent recalibration due to voltage variations, leading to operational inefficiencies and increased costs.

Innovation Solution

A motor driver circuit comprising a non-inverting buffer circuit, an inverting buffer circuit, and a scalar circuit with a Supply Tracked Common Mode Voltage (VCMSC) generation circuit, which provides a common mode voltage to the motor, automatically tracking variations in supply voltage and scalar gain, ensuring linear motor current versus control voltage characteristics without dead zones.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If sinusoidal waveforms are used to actuate MEMS scanning mirrors, then the mirrors can be driven at resonance, but discontinuities (dead zones) occur when the mirrors are at resonance

Engineering Contradiction:
Improvescanning speedVSAvoidcontinuity of operation
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent changes the waveform parameter from sinusoidal to triangular waveform. This parameter change eliminates the dead zones that occur with sinusoidal waveforms at resonance, while still allowing the MEMS scanning mirror to be driven at resonant frequencies for high-speed scanning operation.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If conventional circuit architectures are used to drive MEMS scanning mirrors, then the system is simple, but frequent recalibration is required due to supply voltage variations

Engineering Contradiction:
Improvecircuit complexityVSAvoidstability against voltage variations
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent implements a feedback mechanism where the triangular waveform generator is controlled by a controller that monitors the mirror position and adjusts the waveform accordingly. This feedback loop compensates for supply voltage variations, eliminating the need for frequent recalibration while maintaining system stability.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs self-calibration by using the controller to automatically adjust the triangular waveform parameters based on detected mirror position and supply voltage conditions. This self-service capability eliminates the need for manual recalibration operations.

Inventive Principle:
Principle #25Self-service

3Device complexity

If sinusoidal waveforms are used to drive MEMS scanning mirrors, then the driving mechanism is simple, but dead zones prevent data encoding and decoding

Engineering Contradiction:
Improvedriving mechanism complexityVSAvoiddata encoding capability
Core Design Contradiction:
Device complexityVSLoss of information

Solution Approach 1:

The patent changes the driving waveform from sinusoidal to triangular, which eliminates dead zones. This allows continuous data encoding and decoding to occur during scanning operations, preventing information loss while maintaining a relatively simple driving mechanism through the use of a triangular waveform generator.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables bidirectional high current drivability, linear motor current control, and adjustable image projection size, maintaining image quality while operating independently of supply voltage variations, eliminating the need for frequent recalibration.

Implementation Method 1

the VCMSC voltage is generated by the VCMSC generation circuit in response to a control supply voltage and a driver supply voltage provided to the VCMSC generation circuit

Methodology Applied
Scientific EffectElectrical voltage tracking:

Implementation Method 2

These scanning mirrors are actuated by electrostatic or electromagnetic forces

Methodology Applied
Scientific EffectElectromagnetic force: Electromagnetic Induction

Implementation Method 3

These scanning mirrors are actuated by electrostatic or electromagnetic forces to reflect incident light beam from a laser source in order to project 2D image patterns onto a surface

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS9581807B2Supply independent and programmable non-resonant MEMS driver
Publication Date: 2017.02.28 MARADIN
  • US9581807B2 patent drawing
  • US9581807B2 patent drawing
  • US9581807B2 patent drawing

AI summary

A motor driver circuit for a Micro-electro-mechanical systems (MEMS) micro-mirror device, the motor driver circuit comprising: a non-inverting buffer circuit; an inverting buffer circuit; and a scalar circuit, the scalar circuit comprising a Supply Tracked Common Mode Voltage (VCMSC) generation circuit, wherein the non-inverting buffer circuit, the inverting buffer circuit, and the scalar circuit are configured, together with the VCMSC generation circuit, to provide a common mode voltage to a motor in response to a VCMSC voltage generated by the VCMSC generation circuit, and wherein the VCMSC voltage is generated by the VCMSC generation circuit in response to a control supply voltage and a driver supply voltage provided to the VCMSC generation circuit.