MEMS Electrometer Using Cantilever Beam Repulsion for Static Field Detection

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Solution Overview

Problem

Existing static field detection methods are either inaccurate, unstable, or impractical for use in small equipment or fluid environments due to their expense and complexity, particularly in preventing damage to sensitive electronics like printed circuit boards (PCBs) from electrostatic discharge (ESD).

Innovation Solution

A microelectromechanical systems (MEMS) device with two cantilevered beams of conductive material that repel each other in the presence of a static field, featuring a sensor to detect displacement and a rupturable indicator that fractures or changes state upon reaching a predetermined repulsion distance, allowing for accurate and cost-effective detection of static fields.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If modern electrometers are used to detect static fields, then measurement precision is improved, but device complexity and cost increase

Engineering Contradiction:
Improvestatic field detection accuracyVSAvoidelectrometer structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex electronic sensing systems with a simple mechanical beam repulsion system. Two conductive beams are positioned close to each other and respond mechanically to electrostatic forces, converting an electrical measurement problem into a mechanical displacement measurement that can be detected by simple optical or capacitive sensors.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the measurement parameter from direct electrical field measurement to mechanical displacement measurement. By measuring the displacement of beams caused by electrostatic repulsion, the system achieves accurate static field detection using simpler, more cost-effective displacement sensing techniques.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If sophisticated detection techniques are employed, then measurement precision is improved, but ease of operation deteriorates in fluid environments

Engineering Contradiction:
Improvecharge detection accuracyVSAvoidusability in fluid environments
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The mechanical beam system is inherently resistant to fluid environment challenges that plague electronic sensors. The beams respond directly to electrostatic forces regardless of surrounding media, providing reliable operation in fluids where electronic components would fail or require complex protection.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If simple gold-leaf electrometers are used, then device complexity is reduced, but reliability deteriorates due to inaccuracy and instability

Engineering Contradiction:
Improveelectrometer structure simplicityVSAvoiddetection stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent improves upon the simple gold-leaf design by changing from leaf-based measurement to beam-based measurement with defined geometric parameters. The beams have controlled dimensions, materials, and positioning, providing stable and repeatable responses to electrostatic fields while maintaining mechanical simplicity.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates an improved version of the classic electrometer by replacing the traditional gold-leaf components with precisely engineered beam structures that replicate the fundamental repulsion principle while eliminating the instability and inaccuracy of the original design.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS device provides a reliable, cost-effective means to detect static fields, preventing damage to sensitive electronics by accurately indicating the presence of electrostatic discharge, suitable for use in various environments including small equipment and fluids.

Implementation Method 1

The two beams repel each other in the presence of a static field

Methodology Applied
Scientific EffectElectrostatic repulsion: Ion Repulsion/Attraction

Data Source

PatentUS7924018B2MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
Publication Date: 2011.04.12 ILLINOIS TOOL WORKS INC
  • US7924018B2 patent drawing
  • US7924018B2 patent drawing
  • US7924018B2 patent drawing

AI summary

An apparatus for detecting a static field includes a microelectromechanical systems (MEMS) device having two cantilevered beams of conductive material that are adjacent and substantially parallel to each other. The two beams repel each other in the presence of a static field. At least one sensor detects a respective amount of displacement of the two cantilevered beams from a rest position and determines an amount of repulsion of the two cantilevered beams from each other.