MEMS Electrostatic Actuator for Compact Image Stabilization

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Solution Overview

Problem

Existing optical image stabilization systems, particularly those using voice coil motors, face challenges in miniaturization, leading to larger sizes that hinder the development of compact imaging and electronic devices.

Innovation Solution

The implementation of a micro-electromechanical system (MEMS) with pectinate electrodes and a deformable connection member, such as a silicon wire, to generate electrostatic forces and move an image sensor, allowing for compact size and efficient power consumption, while maintaining effective mechanical frequency and compensation capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a voice coil motor is used as an actuator in an optical image stabilization system, then the system can achieve effective image stabilization, but the size of the imaging device and electronic device increases

Engineering Contradiction:
Improveimage stabilization capabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent replaces the voice coil motor (electromagnetic actuation) with a micro-electromechanical system using comb-drive actuators that generate electrostatic forces. This substitution of the actuation mechanism enables significant miniaturization while maintaining optical image stabilization functionality, directly resolving the contradiction between stabilization capability and device size

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs out-of-plane comb-drive actuators that move the image sensor package in the vertical dimension to compensate for in-plane image jitter. This dimensional transformation allows compact in-plane actuation structures to achieve stabilization against planar vibrations, resolving the size-stabilization contradiction

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If a voice coil motor is used as an actuator, then image stabilization function is achieved, but power consumption increases

Engineering Contradiction:
Improveimage stabilization functionVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent substitutes electromagnetic actuation with electrostatic comb-drive actuation, which consumes significantly less power. The electrostatic comb-drive actuators generate forces through voltage application to comb-like electrodes, enabling image stabilization with reduced power consumption compared to voice coil motors

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Volume of moving object

If the image sensor package is miniaturized, then device size is reduced, but mechanical frequency and compensation capability deteriorate

Engineering Contradiction:
Improveimage sensor package sizeVSAvoidmechanical frequency
Core Design Contradiction:
Volume of moving objectVSStress or pressure

Solution Approach 1:

The patent designs the image sensor package with a movable support structure that is dynamically optimized for vibration compensation. The support structure includes spring elements and dampers that provide appropriate mechanical frequency and damping characteristics, allowing miniaturized packages to maintain adequate mechanical frequency for effective stabilization

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The out-of-plane comb-drive actuators enable compact in-plane actuation structures to achieve stabilization against in-plane vibrations by transforming the actuation direction, allowing miniaturization without sacrificing mechanical frequency or compensation capability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS-based optical image stabilization system achieves miniaturization, reduces power consumption, and enhances mechanical frequency, providing precise image stabilization with improved mechanical accuracy and reduced size compared to traditional voice coil motors.

Implementation Method 1

the fixed electrode and the movable electrode are configured to generate an electrostatic force under a driving voltage

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

the deformable connection member is configured to deform under the electrostatic force in a direction where the movable electrode moves

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentEP3454543B1Imaging method, imaging device, and electronic device
Publication Date: 2022.12.28 GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP LTD
  • EP3454543B1 patent drawingFigure 1~2
  • EP3454543B1 patent drawingFigure 3~4
  • EP3454543B1 patent drawingFigure 5

AI summary

An optical image stabilization system (10). The optical image stabilization system comprises a micro electro mechanical system (12) and an image sensor (14). The micro electro mechanical system comprises a fixed electrode (122), a movable electrode (124) cooperating with the fixed electrode, and a deformable connection member (126) fixedly connected to the fixed electrode and the movable electrode. The image sensor is fixedly connected to the movable electrode. The fixed electrode and the movable electrode are used for generating electrostatic force under the action of a driving voltage. The connection member is used for implementing deformation under the action of the electrostatic force along the direction where the movable electrode moves to allow the movable electrode to move, so as to drive the image sensor to move to compensate a jitter. Because the micro electro mechanical system is manufactured by using a semiconductor manufacturing technology and has a small size, minimization of the optical image stabilization system is facilitated. An imaging device and an electronic device.