MEMS Filter With Dynamic Passageway Size Control
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Solution Overview
Problem
Current particle filtration technologies, such as those using porous or fiber-based materials, lack precise control over passageway size, leading to limited flexibility and increased costs due to the need for specific designs for each application, and are unable to effectively filter fundamental molecules.
Innovation Solution
The development of filters and catalyzers with variable size passageways fabricated on a die using semiconductor processes like photolithography and etching, where MEMS actuators control the passageway size, allowing for precise adjustment down to angstrom scales and enabling filtration of molecules by dynamically changing passageway dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If porous or fiber-based materials are used for filtration, then filtration capability is provided, but precise control over passageway size is lost
Solution Approach 1:
The patent implements movable walls that can dynamically adjust the passageway size between open and closed positions. This dynamic structure allows the filter to adapt passageway dimensions in real-time, providing both precise size control and versatility for different filtration applications with a single device.
Solution Approach 2:
The patent changes the physical state and dimensions of the passageways by moving walls between different positions. This parameter change enables precise control over passageway size, allowing the same filter structure to be used for different particle size filtrations without requiring multiple fixed designs.
2Manufacturing precision
If fixed design filters are used for specific applications, then filtration precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent creates a universal filter design with adjustable passageways that can perform multiple filtration functions. By implementing movable walls that can be positioned at different locations, a single filter device can replace multiple fixed-design filters, reducing overall system complexity while maintaining precise filtration capabilities.
Solution Approach 2:
The dynamic adjustable structure allows one filter device to adapt to different filtration requirements, eliminating the need for multiple specialized filters. This reduces device complexity and cost while maintaining the precision needed for different application-specific filtrations.
3Manufacturing precision
If standard fabrication processes are used, then manufacturing ease is maintained, but passageway size resolution is insufficient for fundamental molecules
Solution Approach 1:
The patent segments the passageway structure into movable wall components that can be independently controlled. This segmentation allows precise positioning of each wall segment to achieve angstrom-level resolution, while the modular nature of the segmented structure maintains compatibility with standard semiconductor fabrication processes.
Solution Approach 2:
The patent replaces traditional mechanical adjustment mechanisms with MEMS-based actuation systems. This substitution enables precise passageway size control at the molecular level while maintaining ease of manufacture through integration with standard semiconductor fabrication processes, avoiding complex mechanical assembly steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a flexible and accurate filtration method capable of filtering fundamental molecules, offering enhanced precision and versatility in fluid processing applications, including catalysis and clog prevention, while reducing the need for multiple filters and increasing practicality.
Implementation Method 1
actuators are MEMS actuators based on electrostatic, electromagnetic or piezoelectric forces
Implementation Method 2
actuators are MEMS actuators based on electrostatic, electromagnetic or piezoelectric forces
Implementation Method 3
actuators are MEMS actuators based on electrostatic, electromagnetic or piezoelectric forces
Data Source
AI summary
The present invention provides a filter for separating particles and/or catalyzer for particle reaction in a fluid. The device comprising array of passageways fabricated on a die wherein the passageway size is controlled by actuators. The passageway size is monitored and the actuators controlling the passageway size are activated conditionally upon the passageway size monitoring. Using movable actuators the passageway can achieve passageway size that is less then the fabrication minimal resolution. Proper locating, setting and/or activation of the actuators create passageways that can perform filtration of particles, trapping of particles and catalyzing particles reaction.