MEMS Flexible Part Dynamics for Displacement and Tension
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Solution Overview
Problem
In MEMS devices, the tension on flexible parts rapidly increases as the mass body rotates, leading to increased rigidity and limited displacement, as well as noise due to resonance frequency changes.
Innovation Solution
The design includes flexible parts with specific dimensions and orientations, where one end is connected to the mass body and the other end is closer to the rotation axis, minimizing tension increase and maintaining rigidity, thereby preventing limited displacement and noise from resonance frequency changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the flexible part is extended farther from the rotation axis to increase displacement range, then the sensing capability is improved, but the tension increases rapidly causing rigidity increase and limiting displacement
Solution Approach 1:
The patent applies dynamics by making the flexible part's connection point movable along the radial direction rather than fixed. This allows the connection radius to dynamically adjust during operation, enabling the system to optimize between displacement range and tension forces. The flexible part can extend farther when needed for sensing while retracting when tension becomes excessive, resolving the contradiction between displacement range and tension forces.
2Measurement precision
If the beam rigidity is increased to reduce deformation, then the measurement precision is improved, but the resonance frequency changes causing noise increase
Solution Approach 1:
The patent applies parameter changes by dynamically adjusting the connection radius of the flexible part. By changing this geometric parameter, the system can modify the beam's effective rigidity and resonance characteristics. When measurement precision is prioritized, the connection point is positioned to increase rigidity; when noise reduction is prioritized, the position is adjusted to optimize resonance frequency, thus resolving the contradiction between measurement precision and noise.
3Ease of operation
If the flexible part is made longer to allow greater mass body rotation, then the rotation range is improved, but the tension increases rapidly limiting further rotation
Solution Approach 1:
The patent resolves this contradiction by making the flexible part's connection radius dynamic rather than fixed. The flexible part can be positioned at different radial distances from the rotation axis depending on the rotation angle and operational requirements. This dynamic positioning allows the system to achieve greater rotation ranges when structural integrity is maintained, while preventing excessive tension that would compromise reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for controlled displacement of the mass body in desired directions while preventing crosstalk and resonance interference, ensuring accurate measurement of acceleration and angular velocity.
Implementation Method 1
a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part
Data Source
AI summary
Disclosed herein is a micro electro mechanical systems (MEMS) device including: a mass body; a first fixed part provided at an outer side of the mass body; and a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part.