MEMS Flow Control Actuators With Plasma Cleaning and Sensing

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Solution Overview

Problem

Existing flow control actuators, such as DBD and piezo actuators, are limited in their ability to influence fluid flows near aerodynamic profiles and lack versatility for surface cleaning and aerodynamic parameter measurement.

Innovation Solution

A combination of MEMS technology-based piezo and DBD actuators, integrated with bionic surface structures, enables enhanced flow control, surface cleaning, and measurement of aerodynamic parameters, including contamination and icing detection, through the use of piezo transformers and bionic structures for reduced resistance and energy efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional DBD or piezo actuators are used for flow control, then flow control capability is achieved, but versatility for surface cleaning and aerodynamic parameter measurement is limited

Engineering Contradiction:
ImproveversatilityVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines DBD actuators, piezo actuators, and sensors into a single integrated assembly that can perform flow control, surface cleaning, and aerodynamic parameter measurement simultaneously, resolving the contradiction by merging multiple functions into one device

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated assembly is designed to perform multiple functions including flow control through plasma actuation, surface cleaning through plasma chemistry, and measurement of aerodynamic parameters through embedded sensors, achieving versatility without proportionally increasing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Volume of moving object

If MEMS technology is used to miniaturize actuators, then integration density is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveactuator sizeVSAvoidmanufacturing precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The assembly is segmented into distinct functional modules (DBD actuators, piezo actuators, sensors) that can be manufactured separately using appropriate precision levels and then integrated, managing manufacturing precision requirements through modular construction

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Standardized mounting structures and interface layers act as intermediaries between the MEMS components and the aerodynamic profile surface, absorbing manufacturing tolerances and reducing the impact of precision variations on overall system performance

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If bionic structures are added to the assembly surface, then flow resistance is reduced, but device complexity increases

Engineering Contradiction:
Improveflow resistanceVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

Bionic structures such as riblet patterns are applied only to specific regions of the assembly surface where flow control is most beneficial, reducing overall flow resistance without adding complexity to the entire device structure

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated MEMS actuators provide a wide range of applications, including efficient flow control, surface cleaning, and accurate measurement of aerodynamic parameters, enhancing the performance and efficiency of aerodynamic profiles by reducing contamination and ice accumulation while maintaining energy efficiency.

Implementation Method 1

When an electric voltage is applied, a mechanical motion is created (piezo actuator, so-called inverse piezo effect)

Methodology Applied
Scientific EffectInverse piezo effect: Piezoelectric Effect

Implementation Method 2

During the operation of the DBD actuator at the exposed electrode a plasma is created from the ambient air, i.e. ionized air, which consists of ions and electrons

Methodology Applied
Scientific EffectDielectric barrier discharge: Plasma

Data Source

PatentUS10995780B2Actuators for flow control at surfaces of aerodynamic profiles
Publication Date: 2021.05.04 AIRBUS DEFENCE & SPACE GMBH
  • US10995780B2 patent drawing
  • US10995780B2 patent drawing
  • US10995780B2 patent drawing

AI summary

An assembly for arrangement to the surface of an aerodynamic profile comprises an array of actuators, which are designed as piezo actuators and plasma actuators.