MEMS Fluid Control Device with Piezoelectric Actuation
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Solution Overview
Problem
Conventional fluid transportation devices face challenges in miniaturization, dimensional accuracy control, and insufficient flow rate, leading to unstable fluid transport and complexity in increasing fluid transportation capacity.
Innovation Solution
A micro-electromechanical fluid control device is developed using a MEMS process, integrating an inlet plate, substrate, resonance membrane, actuating membrane, and outlet plate with piezoelectric membranes to create a compact, thin structure that overcomes dimensional accuracy issues and enhances flow rate through a pressure gradient mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If conventional mechanism components are miniaturized to achieve small device size, then device size is reduced, but dimensional accuracy and assembly accuracy become difficult to control
Solution Approach 1:
The patent integrates multiple conventional mechanism components into a single monolithic structure fabricated by MEMS processes. The fluid transportation device includes inlet plates, convergence chambers, resonance membranes, actuating membranes, and outlet plates all formed as one integrated component, eliminating the need for separate assembly of multiple parts and thus resolving the accuracy issues associated with miniaturized component stacking.
Solution Approach 2:
The patent replaces conventional mechanical assembly methods with MEMS fabrication processes. Instead of stacking and assembling separate mechanical components, the entire device is created using micro-electromechanical manufacturing techniques that inherently provide better dimensional control and integration at the micro-scale.
2Productivity
If multiple conventional fluid transportation devices are arranged side by side to increase flow rate, then transportation amount increases, but assembly accuracy becomes difficult to control and power connection complexity increases
Solution Approach 1:
The patent integrates multiple flow guiding units into a single device structure, allowing multiple fluid transportation channels to coexist within one monolithic component. This eliminates the need to assemble multiple separate devices side by side, thereby maintaining assembly accuracy while achieving increased flow rate through parallel fluid paths within the integrated structure.
3Volume of moving object
If conventional fluid transportation devices are miniaturized, then device size is reduced, but fluid transportation becomes unstable
Solution Approach 1:
The integration of all functional elements into a monolithic MEMS structure ensures precise geometric relationships between components, maintaining stable fluid dynamics despite miniaturization. The resonance membranes and actuating membranes are precisely formed with controlled thicknesses and dimensions, ensuring stable resonant operation and consistent fluid transportation at micro-scale.
Solution Approach 2:
The patent employs specific parameter ranges for membrane thicknesses (e.g., resonance membrane thickness of 1-10 μm, actuating membrane thickness of 1-10 μm) and chamber dimensions to optimize both miniaturization and operational stability. These carefully controlled parameters ensure that the device achieves small size while maintaining stable fluid transportation through resonant actuation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves stable and high-yield fluid transport with flexible arrangement and control, enabling efficient fluid flow at a high rate while maintaining a compact and silent operation.
Implementation Method 1
the piezoelectric membrane is attached on a surface of the suspension part of the actuating membrane... While the piezoelectric membrane of the flow guiding unit drives the actuating membrane
Implementation Method 2
The resonance membrane includes a suspension structure made by a surface micromachining process and includes at least one central aperture... transported into the first chamber via the central aperture of the resonance membrane
Data Source
AI summary
A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.