MEMS Resonator Frame Segmentation to Prevent Deformation
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Solution Overview
Problem
MEMS sensors face defects due to deformation of the frame structure during attachment to a substrate, leading to potential damage or electrical shorts among resonators, which affects their accuracy and reliability in sensing applications.
Innovation Solution
A micro electro-mechanical system (MEMS) sensor design featuring a substrate with a first and second frame, where the second frame is connected to the substrate and has a monolithic structure with silicon material, including a first region connected to the first frame and a second region spaced apart, to prevent deformation and stabilize the first frame, thereby reducing defects and maintaining resonator accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the frame structure is attached to the substrate, then the MEMS sensor can be mounted and operated, but the frame deforms causing defects and electrical shorts among resonators
Solution Approach 1:
The frame is divided into multiple segments (first frame and second frame) that are spaced apart from each other. This segmentation prevents the frame from deforming as a single rigid structure during substrate attachment, thereby preventing defects and electrical shorts while maintaining operational reliability.
2Strength
If the first frame is directly connected to the substrate, then the resonators can be supported, but the frame structure deforms under stress
Solution Approach 1:
The frame is segmented into first and second frames that are spaced apart. This allows the structure to maintain strength through distributed support while preventing deformation by avoiding continuous rigid connections that would transmit stress throughout the entire frame.
Solution Approach 2:
A spacer is introduced as an intermediary element between the first frame and the substrate. This spacer provides the necessary support and spacing, preventing direct contact that would cause deformation while maintaining the structural stability needed to support the resonators.
3Measurement precision
If the resonators are densely arranged on the frame, then the sensing accuracy improves, but the risk of electrical shorts increases due to frame deformation
Solution Approach 1:
The frame is segmented into spaced-apart first and second frames, which prevents deformation that would otherwise cause electrical shorts. This allows resonators to be densely arranged on the stable frame structure, improving sensing accuracy without increasing the risk of electrical shorts.
Data Source
AI summary
Provided is a micro electro-mechanical system (MEMS) sensor including a substrate including a first cavity, a first frame including a second cavity at least partially overlapping the first cavity, at least a portion of the first frame being spaced apart from the substrate, a plurality of resonators, each of the plurality of resonators including a first end connected to the first frame and a second end extending into the second cavity, and a second frame including a first region connected to the first frame and a second region spaced apart from the first frame and connected to the substrate.