Compact MEMS Gas Sensor with Selective Temperature Profiles
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Solution Overview
Problem
Current gas sensors lack selectivity and are often bulky, requiring separate separation devices like chromatography columns and pre-concentrators, which are energy-intensive and difficult to integrate into compact systems, especially for portable applications.
Innovation Solution
A compact microelectromechanical or nanoelectromechanical gas sensor with a suspended part and a sensitive zone that adsorbs and desorbs gaseous species using controlled temperature profiles to enhance selectivity, integrating separation and detection functions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate separation devices like chromatography columns and pre-concentrators are used to enhance selectivity, then gas species discrimination capability is improved, but device size and complexity increase
Solution Approach 1:
The patent combines the separation function and detection function into a single integrated sensor device. The sensitive surface performs both separation of gas species and detection, eliminating the need for separate chromatography columns and pre-concentrators. This merging reduces device size and complexity while maintaining gas species discrimination capability.
Solution Approach 2:
The sensitive surface is designed to perform multiple functions: it acts as both the separation medium and the detection element. By making the sensitive surface universal, the device eliminates redundant components and achieves compact integration while preserving selectivity for different gas species.
2Measurement precision
If chromatography columns and pre-concentrators are used for gas separation, then selectivity is improved, but energy consumption increases due to heating requirements
Solution Approach 1:
By merging separation and detection into the sensitive surface, the patent eliminates the need for separate heating systems required by traditional chromatography columns and pre-concentrators. The integrated design reduces overall energy consumption while maintaining selectivity through the sensitive surface's inherent separation capability.
3Measurement precision
If traditional separation devices are used, then gas species separation is achieved, but integration into compact portable devices becomes difficult
Solution Approach 1:
The patent merges separation and detection functions into a single sensitive surface, creating a compact integrated sensor that can be easily incorporated into portable devices. This eliminates the integration difficulties associated with traditional separate separation devices while preserving gas species separation capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor provides enhanced selectivity and compactness by controlling temperature profiles to separate and detect gaseous species, reducing energy consumption and enabling integration into portable devices.
Implementation Method 1
a sensitive zone carried on the suspended part, said sensitive zone being able to adsorb/absorb and desorb gaseous species
Implementation Method 2
a heating means for at least the sensitive zone... control means of said heating means so that said heating means can apply at least to said sensitive zone one or more temperature profiles
Implementation Method 3
detection means for detecting the adsorption and desorption of at least two gaseous species
Data Source
AI summary
A microelectromechanical gas sensor including a fixed part, at least one suspended part in relation to fixed part, at least one sensitive zone carried on the suspended part, the sensitive zone being able to adsorb/absorb and desorb gaseous species or families of gaseous species, a heater for heating at least the sensitive zone, a detector for detecting the adsorption/absorption and desorption of gaseous species or families of gaseous species on the sensitive zone, a controller of controlling the heater so that the heating is applied to at least the sensitive zone with one or more temperature profiles ensuring the adsorption/absorption and desorption of the gaseous species in a controlled manner so as to obtain an individual desorption of each species or families of gaseous species.