MEMS Getter Integration for Gyroscope Offset Stability

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Solution Overview

Problem

Microelectromechanical systems (MEMS) devices face challenges in maintaining stable pressure within their cavities, which can lead to gyroscope offset shifts over the device's lifetime.

Innovation Solution

The integration of getters within the MEMS devices, specifically configured to lower and stabilize the pressure within cavities at or near vacuum pressure, while also absorbing unwanted gas species at high temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If getters are integrated into MEMS devices to stabilize cavity pressure, then gyroscope offset stability is improved, but device complexity increases

Engineering Contradiction:

Improvegyroscope offset stabilityVSAvoiddevice complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The getter is integrated directly into the MEMS device structure, merging the pressure stabilization function with the existing gyroscope cavity. This combination eliminates the need for separate pressure control systems while maintaining gyroscope offset stability throughout the device lifetime.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The getter material automatically absorbs unwanted gas species that outgas from cavity surfaces at high temperatures, providing self-regulating pressure stabilization without requiring external control systems. The getter performs its function passively through its inherent chemical absorption properties.

Inventive Principle:

Principle #25Self-service

2Reliability

If getters are used to absorb gas species at high temperatures, then cavity pressure stability is improved, but manufacturing complexity increases

Engineering Contradiction:

Improvecavity pressure stabilityVSAvoidmanufacturing complexity

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The getter is pre-integrated into the MEMS device structure during the fabrication process, positioned within the cavity before sealing. This preliminary placement ensures the getter is ready to immediately absorb outgassed species when the device undergoes high-temperature operation, eliminating the need for post-manufacturing assembly steps.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The getter material is selected and configured to become highly effective at gas absorption specifically at the high operating temperatures of the MEMS device. The temperature parameter change activates the getter's optimal performance characteristics when most needed, during high-temperature operation.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of getters effectively reduces gyroscope offset shifts by maintaining a stable pressure environment within the MEMS devices, enhancing their operational reliability and longevity.

Implementation Method 1

Methodology Applied

Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS12319562B2Systems and methods for providing getters in microelectromechanical systems

Publication Date: 2025.06.03 INVENSENSE INC

AI summary

Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebetween. A first getter is provided on the substrate in the first cavity and integrated with an electrode. A second getter is provided in the first cavity over a passivation layer on the substrate. In some embodiments, the first cavity is a gyroscope cavity, and the second cavity is an accelerometer cavity.