Magnetostrictive MEMS Gradiometer for Low-Power Ambient Field Sensing

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Solution Overview

Problem

Current magnetic sensing technologies, such as fluxgate, SERF, and SQUID-based magnetometers, face limitations in sensitivity, power consumption, and size, making them unsuitable for applications requiring high sensitivity in ambient fields and wide bandwidths without the need for cooling or shielding.

Innovation Solution

A small, cm-size MEMS-based magnetic gradiometer using magnetostrictively-driven piezoelectric resonators with a magnetostrictive film, capable of operating at room temperature and rejecting common-mode signals, is developed, allowing for vector detection with high sensitivity and low power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If fluxgate magnetometers are used for magnetic sensing, then sensitivity in the 20-50 pT/√Hz range is achieved, but power consumption is several hundred mW and bandwidth is limited to about 1 kHz

Engineering Contradiction:
Improvemagnetic field sensitivityVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent replaces traditional electromagnetic sensing mechanisms with a magnetostrictive-mechanical-resonance system. Magnetostrictive material converts magnetic field changes into mechanical strain, which modulates the resonance frequency of a mechanical resonator. This mechanical resonance approach enables high sensitivity with minimal power consumption, as the resonator can be driven at very low power levels while achieving narrow linewidth and high Q-factor measurements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent utilizes changes in resonance frequency as the primary sensing parameter. By monitoring shifts in the resonator's natural frequency caused by magnetostrictive strain, the system achieves high magnetic field sensitivity. The narrow resonance linewidth and high quality factor enable precise frequency measurements, translating to improved magnetic field detection capability with low power consumption.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If SERF atomic magnetometers are used, then sensitivities in the 1-50 fT/√Hz range are achieved, but power consumption is >1 W and cooling to 150°C is required

Engineering Contradiction:
Improvemagnetic field sensitivityVSAvoidpower consumption and cooling requirements
Core Design Contradiction:
Measurement precisionVSUse of energy by stationary object

Solution Approach 1:

The patent replaces complex atomic physics-based SERF magnetometry with a simpler magnetostrictive-mechanical resonance system. Instead of using optically pumped atomic vapors requiring heating and complex optical paths, the invention uses magnetostrictive material coupled to a mechanical resonator, eliminating the need for high power consumption and thermal management while achieving comparable or sufficient sensitivity for many applications.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a solid-state magnetostrictive resonator system that is inherently more robust and requires no fragile optical components, vacuum systems, or continuous atomic vapor supply. The mechanical resonator with magnetostrictive coating provides a compact, low-power, room-temperature alternative to the complex SERF system infrastructure.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Measurement precision

If SQUID-based magnetometers are used, then sensitivities in the 1-10 fT/√Hz range are achieved, but cooling to 4.2 K is required and power consumption is many watts

Engineering Contradiction:
Improvemagnetic field sensitivityVSAvoidoperating temperature
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The patent replaces superconducting quantum interference device physics with magnetostrictive-mechanical resonance. Instead of requiring superconducting coils and SQUID junctions that must be maintained at 4.2 K, the invention uses room-temperature magnetostrictive material and classical mechanical resonance, eliminating cryogenic requirements while achieving practical sensitivity levels.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent monitors resonance frequency shifts as the primary sensing mechanism. The magnetostrictive material's strain-induced frequency modulation provides a direct, linear relationship between magnetic field and measurable parameter, eliminating the need for complex superconducting circuits and cryogenic operation.

Inventive Principle:
Principle #35Parameter changes

4Adaptability or versatility

If magnetic coils are added for canceling earth's magnetic field in SERF magnetometers, then operation in ambient fields is enabled, but gradient magnetic noise from the coils decreases sensitivity to 0.5 pT/√Hz

Engineering Contradiction:
Improveoperation in ambient magnetic fieldsVSAvoidmagnetic field sensitivity
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent replaces electromagnetic coil-based field cancellation with a mechanically-isolated resonant sensing approach. The magnetostrictive resonator can be designed with magnetic shielding or differential configurations that reject common-mode magnetic noise from earth's field or nearby coils, while the narrow resonance linewidth provides inherent noise filtering that maintains high sensitivity even in ambient magnetic environments.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses the mechanical resonator as an intermediary that converts magnetic field effects into mechanical motion, which can then be detected with high precision. This mechanical intermediate stage provides isolation from direct magnetic interference and enables the use of magnetic shielding or differential measurements to reject environmental magnetic noise while preserving signal sensitivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a compact, low-power magnetic gradiometer with sub-pT/√Hz sensitivity and wide bandwidth, enabling applications like field magnetic imaging without the need for extensive shielding or cooling, and is suitable for portable or UAV-based imaging.

Implementation Method 1

A small, cm-size MEMS-based magnetic gradiometer using magnetostrictively-driven piezoelectric resonators with a magnetostrictive film

Methodology Applied
Scientific EffectMagnetostriction: Magnetostriction

Implementation Method 2

magnetostrictively-driven piezoelectric resonators

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11988727B1Magnetostrictive MEMS magnetic gradiometer
Publication Date: 2024.05.21 HRL LAB
  • US11988727B1 patent drawing
  • US11988727B1 patent drawing
  • US11988727B1 patent drawing

AI summary

A magnetic gradiometer sensor comprising a substrate with at least a pair of resonators disposed thereon, wherein each of the at least a pair of resonators is coated with a magnetostrictive film. The resonators are preferably connected to sustaining circuits to form oscillators and the oscillators are preferably used within a phase lock loop to detect a difference in the magnetic field between the at least a pair of resonators.