MEMS Gyroscope Coupling Device for Yaw Rate Vector Measurement
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Solution Overview
Problem
Existing MEMS gyroscopes face challenges in accurately determining multiple components of the yaw rate vector due to manufacturing tolerances, leading to uneven deflection of drive elements and increased control electronics costs, and they do not optimally utilize available space.
Innovation Solution
A micro-electro-mechanical sensor with linear drive elements moving along an x-y plane, featuring two groups of drive elements that are perpendicularly connected via a coupling device to synchronize movements, allowing for the determination of at least two or three components of the yaw rate vector with high accuracy and efficient use of space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple individual sensors are combined to determine multiple yaw rate vector components, then measurement capability is improved, but device complexity and control electronics costs increase
Solution Approach 1:
The patent combines multiple drive elements (first and second drive elements moving perpendicularly, and third and fourth drive elements moving perpendicularly) onto a single substrate to form one integrated sensor. This merging approach allows the sensor to determine multiple yaw rate vector components (wx, wy, wz) simultaneously using shared control electronics, thereby reducing device complexity and control costs while maintaining measurement precision.
Solution Approach 2:
The integrated sensor design enables a single device to perform multiple measurement functions by determining all three components of the yaw rate vector (wx, wy, wz) through the coordinated operation of the drive elements and their associated sense elements, eliminating the need for separate individual sensors for each component.
2Ease of manufacture
If manufacturing tolerances are present, then production ease is improved, but measurement accuracy deteriorates due to uneven drive element deflection
Solution Approach 1:
The patent employs sense elements (such as capacitive sense elements) that detect the positions of the drive elements and provide feedback signals to the control electronics. The control electronics use this feedback to generate correction signals that compensate for manufacturing tolerances and ensure uniform oscillation of the drive elements, thereby maintaining measurement accuracy despite variations in production tolerances.
Solution Approach 2:
The control electronics dynamically adjust operational parameters (such as drive frequencies and amplitudes) based on detected position variations to compensate for manufacturing tolerances. This parameter adjustment ensures that all drive elements oscillate uniformly and generate consistent Coriolis forces, maintaining measurement precision despite production variations.
3Measurement precision
If drive elements are arranged to determine three yaw rate components, then measurement capability is improved, but space utilization deteriorates
Solution Approach 1:
The patent utilizes the third dimension (vertical z-axis) by arranging drive elements and sense elements in stacked configurations above and below the substrate plane. This dimensional approach allows multiple drive elements to occupy different vertical levels rather than competing for horizontal space, enabling three-component yaw rate determination within a compact footprint area.
Solution Approach 2:
The sensor design nests multiple functional components within a compact structure, with sense elements positioned in proximity to drive elements and coupling devices integrating multiple functions. This nested arrangement maximizes the use of available substrate area and vertical space, achieving three-component measurement capability without excessive floor space consumption.
4Ease of manufacture
If drive elements oscillate unsynchronously due to manufacturing variations, then production simplicity is maintained, but measurement accuracy deteriorates
Solution Approach 1:
Sense elements continuously monitor the oscillation positions of drive elements and provide feedback to the control electronics. The control electronics process this feedback to generate correction signals that synchronize the oscillation of all drive elements, ensuring they move uniformly and generate consistent Coriolis forces for accurate measurement, while maintaining simple production processes.
Solution Approach 2:
The control system automatically detects and corrects oscillation synchronization issues through feedback from sense elements, enabling the sensor to self-regulate and maintain accurate measurement without requiring complex manual calibration or adjustment during manufacturing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The synchronized movement of drive elements ensures uniform oscillation and similar Coriolis force reactions, achieving high measurement accuracy with reduced electronic control effort and a compact, economical 3-D gyroscope design.
Implementation Method 1
if the substrate is rotated around a predetermined axis owing to the Coriolis forces (which act on the drive element moved) and is oscillatorily deflected in a predetermined direction
Data Source
AI summary
The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.