Decoupled Control of Quadrature and Resonance in MEMS Gyroscopes
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Solution Overview
Problem
Micro-mechanical rotation rate sensors face interference from undesired edge angles and quadrature signals due to fabrication inaccuracies, which affect resonance frequencies and measurement accuracy, and existing methods for suppressing quadrature signals often influence resonance frequencies or require complex control to manage these issues independently.
Innovation Solution
A method and sensor design using at least three trimming electrode elements to apply specific electric trimming voltages based on resonance frequency, quadrature, and resetting variables, allowing for independent control of quadrature suppression, resonance frequency setting, and deflection resetting, thereby reducing interference and improving measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If voltage is applied to trimming electrodes to suppress quadrature signals, then quadrature suppression is improved, but resonance frequency of the reading-out mode is adversely influenced
Solution Approach 1:
The patent divides the trimming function into separate electrode elements: at least one first trimming electrode element for quadrature suppression and at least one second trimming electrode element for resonance frequency adjustment. This segmentation allows independent control of each function without mutual interference, resolving the contradiction between quadrature suppression and resonance frequency stability.
Solution Approach 2:
Different regions of the trimming electrode structure are assigned different functions: first trimming electrode elements are positioned and configured specifically for quadrature suppression, while second trimming electrode elements are positioned and configured specifically for resonance frequency adjustment. This local differentiation enables each electrode group to optimize its specific function without affecting the other.
2Measurement precision
If trimming electrode elements are used to reset deflection of the seismic mass, then deflection resetting is improved, but resonance frequency and quadrature suppression are adversely influenced
Solution Approach 1:
The patent segments the trimming electrode system into distinct functional groups: first trimming electrode elements for quadrature suppression, second trimming electrode elements for resonance frequency adjustment, and third trimming electrode elements for deflection resetting. This segmentation allows each function to be controlled independently through dedicated electrodes, reducing control complexity while improving measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise measurement of rotation rates by independently managing quadrature suppression, resonance frequency, and deflection resetting, enhancing the accuracy and reliability of micro-mechanical rotation rate sensors by decoupling these influences and reducing unwanted signal components.
Implementation Method 1
an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass
Implementation Method 2
at least one drive device for driving the seismic mass in a primary mode (q1)
Implementation Method 3
micro-mechanical rotation rate sensor which comprises a control arrangement (3)
Data Source
AI summary
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).