MEMS Gyroscope Decoupling Mass Blocks
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Solution Overview
Problem
Existing MEMS gyroscopes face errors due to coupling of sense modes during three-axis detection, leading to superposition of errors and reduced accuracy.
Innovation Solution
A MEMS gyroscope design featuring an anchor point unit, a sensing unit with decoupling mass blocks, and a driving unit, where mass blocks are elastically connected through decoupling structures to prevent motion interference and achieve anti-phase vibration, allowing for differential detection and reduced quadrature error.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If three-axis detection is implemented using integrated MEMS gyroscope with first and second driving mass blocks, then detection capability is improved, but sense modes become coupled causing error superposition
Solution Approach 1:
The sensing unit is segmented into four first mass blocks, four second mass blocks, and four decoupling mass blocks. Each mass block independently responds to angular velocity along different axes, allowing separate detection of three-axis angular velocity without mode coupling. The decoupling mass blocks specifically isolate the sense modes to prevent error superposition.
Solution Approach 2:
Decoupling mass blocks are introduced as intermediary elements between the driving mass blocks and the sensing structure. These decoupling mass blocks act as mediators that isolate the sense modes from each other, preventing coupling between different detection axes while still allowing the integrated three-axis detection function.
2Stability of the object's composition
If mass blocks are elastically connected with anchor point unit, then structural stability is improved, but motion interference between sense modes occurs
Solution Approach 1:
The elastic connection structure is segmented into multiple independent flexible beams connecting each mass block to anchor points. This segmentation allows each mass block to maintain stable structural connection while moving independently, preventing motion interference between sense modes and improving bias stability.
Solution Approach 2:
Flexible beams serve as intermediary elements between the mass blocks and anchor point unit. These flexible beams provide stable structural connection while allowing independent motion of each mass block, isolating the sense modes from each other and preventing motion interference.
3Measurement precision
If decoupling mass blocks are added to reduce mode coupling, then detection accuracy is improved, but device complexity increases
Solution Approach 1:
The decoupling mass blocks are merged with the existing mass block structure, forming an integrated sensing unit where the decoupling function is achieved through the arrangement and connection of mass blocks rather than adding entirely separate components. This merging approach reduces overall device complexity while maintaining detection accuracy.
Solution Approach 2:
The mass blocks serve multiple functions: they act as sensing elements for detecting angular velocity, as structural elements connected to anchor points, and as decoupling elements that isolate sense modes. This multi-functionality reduces the need for separate components, thereby reducing device complexity while improving detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces coupling between sense modes, improves bias stability, and enhances detection accuracy by allowing independent detection of angular velocities on three axes, minimizing the influence of acceleration shock and orthogonal errors.
Implementation Method 1
a sensing unit elastically connected with the anchor point unit, and a driving unit elastically connected with the anchor point unit and the sensing unit
Implementation Method 2
allowing for differential detection and reduced quadrature error... achieve anti-phase vibration
Data Source
AI summary
A MEMS gyroscope includes an anchor point unit, a sensing unit elastically connected with the anchor point unit, and a driving unit elastically connected with the anchor point unit and the sensing unit. The anchor point unit includes four corner anchor point structures arranged at four corners of the MEMS gyroscope and four central anchor points. The sensing unit includes four first mass blocks elastically connected with the corner anchor point structures and the central anchor points to form avoiding spaces, four second mass blocks arranged within the avoiding spaces, and four decoupling mass blocks. The driving unit includes four driving pieces respectively connected with outer sides of the second mass blocks. The MEMS gyroscope realizes independent detection of angular velocities of three axes and realizes differential detection and balance of vibration moment, which immune to influence of acceleration shock and quadrature error and improves detection accuracy.