MEMS Gyroscope Signal Demodulation Circuit

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Solution Overview

Problem

Existing MEMS-type gyroscope systems for measuring angular velocity face challenges in reducing electrical consumption and achieving precise measurements due to the use of phase-locked loops and VCO type oscillators, which result in high power consumption and complexity.

Innovation Solution

An electronic circuit that demodulates the angular speed signal by integrating a measurement signal based on the oscillation of the mass, using a timing signal phase-shifted by π/2, without relying on phase-locked loops, allowing for low-power operation and high-quality factor resonator maintenance, with a simplified circuit design that converts only the angular velocity data using a low-complexity analog-to-digital converter.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a phase-locked loop is used to maintain mass oscillation and measure rotational speed, then measurement precision is improved, but electrical consumption increases

Engineering Contradiction:
Improveangular velocity measurement precisionVSAvoidelectrical consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent extracts the essential function of phase detection from the complex phase-locked loop system. By using a simplified approach where the oscillating mass itself generates the reference signal and a secondary resonator detects the Coriolis effect, the system achieves angular velocity measurement without requiring the full phase-locked loop infrastructure, thereby reducing electrical consumption while maintaining measurement capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The system uses the oscillating mass's own motion to generate the reference signal for measurement, eliminating the need for external VCO type oscillators and complex phase-locked loop control circuits. The secondary resonator naturally detects the Coriolis force induced by rotation, providing self-contained operation that reduces power requirements

Inventive Principle:
Principle #25Self-service

2Measurement precision

If a VCO type oscillator is used to force oscillation and servo-control phase and amplitude, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improveangular velocity measurement precisionVSAvoidcircuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent removes the VCO type oscillator and servo-control infrastructure from the system. Instead of using complex phase and amplitude servo-control, the invention relies on the natural resonance of the primary and secondary resonators, where the oscillating mass provides its own timing reference and the secondary resonator naturally responds to Coriolis forces, achieving measurement without complex control circuits

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Rather than using the secondary resonator's output to control the primary resonator's oscillation (as in conventional force-to-rebalance systems), the patent inverts the approach by using the primary resonator's natural oscillation to drive the system and having the secondary resonator passively detect the rotation-induced Coriolis effect, thereby simplifying the circuit architecture

Inventive Principle:
Principle #13The other way round (Inversion)

3Measurement precision

If phase-locked loop and secondary resonator are used for measurement, then measurement precision is improved, but start-up time increases

Engineering Contradiction:
Improveangular velocity measurement precisionVSAvoidstart-up time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system pre-establishes the oscillation of the primary mass at its resonant frequency before measurement begins. By having the mass already oscillating with defined amplitude and frequency, the system eliminates the time required for phase-locked loop acquisition and oscillation build-up, enabling immediate measurement upon activation while maintaining precision through the sustained oscillation

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient demodulation of the angular velocity signal, reducing power consumption and system complexity, while maintaining high precision in measuring angular velocity with a high-quality factor resonator, facilitating easier implementation and lower electrical costs.

Implementation Method 1

an electronic circuit connected to at least one resonator of a MEMS-type resonator device can also be used to measure an angular speed... a mass maintained by a structure in the form of a spring and capable of being electrically oscillated at a frequency determined by the constant of the spring

Methodology Applied
Scientific EffectOscillation: Harmonic Oscillator

Implementation Method 2

An angular velocity can be determined based on an oscillation velocity of the mass and the generated force, which is perpendicular to the angular velocity and the oscillating displacement of the mass

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 3

following an integration of a measurement signal dependent on the oscillation of the oscillating mass, it is possible to easily demodulate the angular speed signal. Demodulation in an integration unit is performed synchronously on the basis of a timing signal with a frequency equivalent to the oscillation frequency of the moving mass

Methodology Applied
Scientific EffectSignal integration and demodulation:

Data Source

PatentEP2887014B1Electronic circuit for measuring the speed of rotation in a MEMS gyroscope and method for operating the same
Publication Date: 2020.02.05 EM MICROELECTRONIC-MARIN
  • EP2887014B1 patent drawingFigure 1~2
  • EP2887014B1 patent drawingFigure 3
  • EP2887014B1 patent drawingFigure 4

AI summary

An electronic circuit (1) for measuring angular velocity in a MEMS-type gyroscope, the gyroscope comprising a mass (m) connected to a spring (k) and a damping element (d), an activation capacitor (Cact) to activate the mass, and a detection capacitor (Cdet) to detect the movement of the mass. The electronic circuit includes a measuring resistor (4), which is connected to the moving mass and has a resistive variation equal to the oscillation frequency of the mass. The resistor is biased to provide a measurement signal (Sm), which comprises a carrier signal in phase with the oscillation of the mass and an angular velocity signal phase-shifted by π/2 with respect to the carrier signal. The measurement signal is supplied to an integrating unit (5) clocked by a timing signal (SCLK) phase-shifted by π/2 with respect to the carrier signal and originating from a mass drive circuit (3).The angular velocity signal is demodulated at the output of the integrating unit.