MEMS Gyroscope Differential Detection via Symmetric Mass Blocks
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Solution Overview
Problem
MEMS oscillating gyroscopes in prior art lack the capability for differential detection of all axes and have low sensitivity.
Innovation Solution
A MEMS gyroscope based on a rotation mode is designed with an anchor point, driving structures, mass blocks, and detecting transducers arranged symmetrically, featuring in-plane and out-of-plane vibration modes, enabling differential detection and improved sensitivity through large-area detecting transducers and elastic connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional MEMS oscillating gyroscope structure is used, then device complexity is reduced, but differential detection capability is lost and sensitivity decreases
Solution Approach 1:
The gyroscope is divided into multiple detecting components (first detecting component and second detecting component), each with its own mass blocks and detecting transducers. This segmentation enables differential detection across multiple axes while maintaining a relatively simple overall structure. Each segment can be independently optimized for specific detection functions.
Solution Approach 2:
Multiple detecting components are integrated around a central anchor point, with mass blocks from different detecting components positioned to form specific geometric relationships. This merging of multiple detection functions into a single integrated structure achieves differential detection capability without proportionally increasing device complexity.
2Area of moving object
If mass blocks are extended outside driving structures, then detecting area is increased, but structural stability may be compromised
Solution Approach 1:
The mass blocks are designed with non-uniform distribution, extending outside the driving structures in specific directions where detection is needed. The elastic portions are strategically positioned to provide localized support and stability. This local optimization allows increased detecting area in critical regions while maintaining overall structural stability through targeted reinforcement.
Solution Approach 2:
Mass blocks from different detecting components are positioned to form counterbalancing configurations. The geometric arrangement of mass blocks (with included angles less than 180°) creates counterweight effects that enhance structural stability while allowing extended detecting areas.
3Stability of the object's composition
If elastic portions connect detecting components, then mechanical stability is improved, but device size increases
Solution Approach 1:
The elastic portions are designed as flexible connections that allow dynamic movement and vibration of the detecting components. This dynamic design enables the structure to adapt to operational requirements while maintaining stability. The elastic portions can stretch and compress within reasonable limits, providing mechanical stability without requiring oversized rigid structures.
Solution Approach 2:
The elastic portions function as flexible connecting elements between the detecting components and the anchor point. These thin, flexible structures provide the necessary mechanical stability and support while occupying minimal space, thus improving stability without significantly increasing device size.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design facilitates differential detection, enhances sensitivity, and improves the signal-to-noise ratio by utilizing out-of-plane large-area detecting transducers, while maintaining mechanical stability and miniaturization.
Implementation Method 1
A value of the angular velocity Ω is obtained by detecting a displacement of the out-of-plane oscillation
Implementation Method 2
When an angular velocity Ω is applied, the MEMS oscillating gyroscope transfers energy and is switched to a sense mode due to the Coriolis effect
Implementation Method 3
at least two driving structures elastically connected with an outer side of the anchor point
Data Source
AI summary
A MEMS gyroscope includes an anchor point, at least two driving structures connected with the anchor point; a mass group connected with the driving structures, and coupling beams connected with adjacent driving structures. The mass group includes two detecting components arranged on opposite sides of the driving structures and connected with the driving structures. Each of the detecting components includes two mass blocks arranged at intervals and detecting transducers arranged below or above the mass blocks. The mass blocks are connected with the driving structures. At least portions of the mass blocks extend to outsides of the driving structures. The mass blocks and the detecting transducers are symmetrically arranged, which is convenient for realizing differential detection. In an out-plane oscillation mode, most portions of the mass blocks sense an angular velocity. By adopting detecting transducers, electromechanical coupling coefficient of detection is effectively improved, and sensitivity and signal-to-noise ratio are improved.