MEMS Gyroscope Diagonal Elastic Rings for Multi-Axis Sensitivity
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Solution Overview
Problem
Existing MEMS gyroscopes, such as triaxial differential accelerometers, face limitations in allowing flexible movement of the weight along diagonal directions, which affects sensitivity and accuracy in detecting accelerations across multiple axes.
Innovation Solution
A MEMS gyroscope design featuring elastic assemblies formed by multiple hollow rings arranged along diagonal directions of the weight, allowing for flexible movement on X, Y, and diagonal axes, with movable and fixed electrodes forming a capacitance effect to detect changes in position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If two zigzag elastic arms are provided in the X axis direction and the Y axis direction respectively, then the accelerometer can better limit movements of the weight in the X axis direction and the Y axis direction and obtain a degree of sensitivity, but a movement of the weight along a diagonal is not flexible enough
Solution Approach 1:
The elastic assembly is divided into multiple hollow rings arranged along diagonal directions, with each ring providing elastic support in specific directions. This segmentation allows the weight to have flexible movement along diagonals while maintaining sensitivity in X and Y axes through the coordinated arrangement of multiple elastic rings.
Solution Approach 2:
The patent transitions from a two-axis elastic support structure (X and Y directions only) to a multi-directional structure by adding elastic rings arranged along diagonal directions. This dimensional expansion enables the weight to move flexibly along diagonal axes while preserving the original X-Y axis sensitivity through the combined elastic support of all rings.
2Adaptability or versatility
If elastic assemblies formed by multiple hollow rings are arranged along diagonal directions, then flexibility in movement along multiple axes is enhanced, but device complexity increases
Solution Approach 1:
Each hollow ring in the elastic assembly serves multiple functions: providing elastic support in diagonal directions, maintaining structural integrity, and enabling flexible movement along multiple axes simultaneously. This multi-functionality reduces the need for separate components for each function, thereby managing complexity while enhancing movement flexibility.
Solution Approach 2:
The multiple hollow rings are arranged in a nested or concentric configuration along diagonal directions, with smaller rings positioned within or between larger rings. This nesting approach consolidates multiple elastic support functions into a compact structure, reducing overall device complexity while maintaining flexibility in movement along multiple axes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances sensitivity and flexibility in detecting movements along multiple axes, enabling effective detection of accelerations in biaxial or triaxial configurations while maintaining structural integrity.
Implementation Method 1
with movable and fixed electrodes forming a capacitance effect to detect changes in position
Implementation Method 2
A MEMS gyroscope design featuring elastic assemblies formed by multiple hollow rings arranged along diagonal directions of the weight, allowing for flexible movement
Data Source
AI summary
A MEMS gyroscope is provided. The MEMS gyroscope includes a weight provided with elastic assemblies at four corners thereof. The elastic assemblies are arranged in one of diagonal directions of the weight. An electronic device is also provided applying the gyroscope of the present invention.