MEMS Gyroscope Driving Structure with Elastic Coupling
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Solution Overview
Problem
Current microelectromechanical gyroscopes, particularly triaxial ones, face complexity in design and implementation due to the need for multiple control loops for each driving direction, leading to resource-intensive and space-occupying integrated implementations, as well as challenges in maintaining frequency, phase, and amplitude ratios of oscillations.
Innovation Solution
The integration of a mechanical elastic coupling between driving masses moving in transverse directions allows for synchronous movement with a given phase relation, enabling a single driving motion to control all mobile masses and implementing a single feedback control loop, thus simplifying the driving structure and reducing spatial occupation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple control loops are used for each driving direction in triaxial MEMS gyroscopes, then the sensing accuracy and control precision are improved, but the device complexity and spatial occupation increase significantly
Solution Approach 1:
The patent merges multiple independent control loops into a single unified control loop that simultaneously controls driving masses in multiple transverse directions. The mechanical elastic coupling ensures synchronous movement with given phase relations, allowing one control loop to manage what would traditionally require multiple separate loops, thereby reducing device complexity while maintaining sensing accuracy
Solution Approach 2:
The single control loop is designed to perform multiple functions by controlling driving masses in different transverse directions simultaneously. The mechanical elastic coupling structure enables this universal control approach, where one control system achieves what would traditionally require multiple specialized control loops, reducing spatial occupation and simplifying the overall system
2Manufacturing precision
If multiple control loops are implemented for each driving direction, then the frequency and phase control precision are improved, but the spatial occupation and resource consumption increase
Solution Approach 1:
The patent combines multiple control functions into a single control loop that operates on driving masses in transverse directions. The mechanical elastic coupling ensures that frequency and phase relationships are maintained through the physical coupling rather than requiring separate control circuits for each direction, thereby reducing spatial occupation while preserving control precision
Solution Approach 2:
The mechanical elastic coupling acts as an intermediary that transmits and coordinates motion between driving masses in different directions. This mechanical mediator ensures proper frequency and phase relationships without requiring additional electronic control circuits, reducing the spatial footprint of the control system
3Adaptability or versatility
If independent driving structures are used for each driving direction, then the control flexibility and adaptability are improved, but the device complexity and resource usage increase
Solution Approach 1:
The single control loop is designed to universally control driving masses in multiple transverse directions, reducing resource usage while maintaining adaptability. The mechanical elastic coupling provides the necessary flexibility for independent motion control in each direction while using shared control resources, achieving versatility without proportional increases in resource consumption
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the micromechanical structure, reduces spatial occupation, and enhances robustness against external disturbances, allowing for compact and efficient triaxial MEMS gyroscope design suitable for integration in various electronic devices.
Implementation Method 1
a first elastic coupling element, configured to elastically couple said first driving mass and said second driving mass and to couple said first driving movement to said second driving movement with a given ratio of movement
Implementation Method 2
the biasing signals are such as to cause, by means of mutual and alternating attraction of the driving electrodes associated to a given driving mass, self-oscillation of the same driving mass in the corresponding driving direction
Implementation Method 3
When a rotation at a certain angular velocity (the value of which is to be detected) is applied to a mobile mass that is driven with a linear velocity, the mobile mass 'feels' an apparent force, called the 'Coriolis force', which determines a displacement thereof in a direction perpendicular to the direction of the linear driving velocity and to the axis about which the rotation occurs
Implementation Method 4
The mobile mass is supported via elastic elements that enable a displacement thereof in the direction of the apparent force
Data Source
AI summary
An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.