MEMS Gyroscope Eight-Block Resonator Segmentation
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Solution Overview
Problem
Ring MEMS gyroscopes face limitations in drive/detection sensitivity, air damping, mechanical noise, and frequency difference and quadrature errors due to drive/detection capacitance and effective vibration mass.
Innovation Solution
A MEMS gyroscope design featuring eight resonating blocks arranged in a ring shape with coupling beams, allowing for radial and circumferential motion, and a transducer with strategically placed electrodes to enhance sensitivity and reduce noise, featuring a symmetrical disc-like motion mode and increased mass to minimize air damping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If ring MEMS gyroscope structure is used, then symmetrical drive and sense modes are achieved, but drive/detection sensitivity is limited by drive/detection capacitance and effective vibration mass
Solution Approach 1:
The resonator is divided into eight independent resonating blocks arranged in a ring shape, each capable of independent vibration. This segmentation increases the effective vibration mass and allows for enhanced drive/detection sensitivity while maintaining the symmetrical structure benefits
Solution Approach 2:
The patent introduces radial motion in addition to circumferential motion by allowing resonating blocks to move radially relative to the anchor point. This dimensional addition increases the effective vibration mass in multiple directions, improving drive/detection sensitivity beyond what traditional ring gyroscopes achieve
2Object-affected harmful factors
If traditional resonator design is used, then structure is simpler, but air damping and mechanical noise are higher
Solution Approach 1:
Dividing the resonator into eight separate resonating blocks increases the total effective vibration mass, which reduces the impact of air damping relative to the total mass. The segmented structure also allows for optimized coupling beam designs that minimize mechanical noise transmission
Solution Approach 2:
The symmetrical arrangement of eight resonating blocks creates balanced mass distribution that counteracts air damping effects and mechanical noise through mutual compensation, reducing the net harmful effects on sensor performance
3Measurement precision
If process errors occur in manufacturing, then manufacturing is easier, but frequency difference and quadrature error increase
Solution Approach 1:
While maintaining overall symmetrical structure, the patent uses asymmetrical coupling beam configurations and specific electrode arrangements that compensate for process errors. The coupling beams connecting adjacent resonating blocks are designed with specific geometries that reduce sensitivity to manufacturing variations
Solution Approach 2:
The patent optimizes geometric parameters such as coupling beam dimensions, resonating block spacing, and electrode positions to minimize frequency difference and quadrature error. By carefully selecting these parameters, the design becomes more tolerant to process errors while maintaining high measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves sensitivity, reduces mechanical noise, and enhances the quality factor, leading to increased sensitivity and reduced frequency differences and quadrature errors.
Implementation Method 1
the transducer drives the pair of first resonating blocks to vibrate along the first axis and drives the pair of second resonating blocks to vibrate along the second axis
Implementation Method 2
The coupling beam comprises a first coupling beam and second coupling beams arranged at intervals along a radial direction of the anchor point. The first coupling beam and the second coupling beams are elastically deformable.
Implementation Method 3
The resonating blocks are connected with the anchor point through anchoring beams. The coupling beam comprises a first coupling beam and second coupling beams arranged at intervals along a radial direction of the anchor point.
Data Source
AI summary
A MEMS gyroscope includes an anchor point, a resonator, and a transducer. The resonator includes eight resonating blocks arranged at equal intervals and a coupling beam connecting each two adjacent resonating blocks. The resonating blocks are connected with the anchor point through anchoring beams. The anchoring beams decouple radial motion and circumferential motion of the resonating blocks. The resonating blocks include first resonating blocks, second resonating blocks, third resonating blocks, and fourth resonating blocks. In a vibration mode, the transducer drives the first and second resonating blocks to vibrate along a first axis and a second axis respectively, so the third and fourth resonating blocks are driven to vibrate along the fourth axis and the third axis respectively. In a detection mode, the transducer detects vibration of the third resonating blocks along the third axis and the vibration of the fourth resonating blocks along the fourth axis.