MEMS Gyroscope Frequency Mismatch Detection via Cross-Correlation

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Solution Overview

Problem

Microelectromechanical system (MEMS) gyroscopes face reduced amplitude and noise in their sense signals due to frequency mismatch between the drive and sense signals, leading to inaccurate performance, especially under temperature and manufacturing variations.

Innovation Solution

A method and apparatus for detecting frequency mismatch by generating an output signal through cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal is shaped to mimic the gyroscope's frequency response, allowing for demodulation and correlation to determine the frequency mismatch, enabling compensation by adjusting the drive frequency or applying a bias voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If frequency mismatch detection is performed using traditional spectral analysis methods, then detection accuracy can be achieved, but computational complexity and processing time increase significantly

Engineering Contradiction:
Improvefrequency mismatch detection accuracyVSAvoidcomputational complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts only the essential spectral information needed for frequency mismatch detection by using cross-correlation between the drive signal and sense signal. Instead of performing full spectral analysis, the method extracts the specific frequency relationship through correlation operations, which reduces computational complexity while maintaining detection accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent transforms the frequency domain analysis problem into a time domain correlation problem. By changing the parameter space from spectral frequency analysis to temporal cross-correlation, the method achieves equivalent detection accuracy with reduced computational burden, as cross-correlation can be efficiently computed and provides direct frequency mismatch information.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If the gyroscope operates under temperature and manufacturing variations, then the sense signal frequency drifts causing frequency mismatch, but maintaining accurate detection becomes difficult

Engineering Contradiction:
Improvetemperature and manufacturing variation toleranceVSAvoidsense signal frequency accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent implements a feedback mechanism where the cross-correlation result provides real-time information about frequency mismatch. This feedback is used to detect and compensate for frequency drift caused by temperature and manufacturing variations, allowing the system to maintain accurate detection despite environmental changes by continuously adjusting for the detected mismatch.

Inventive Principle:
Principle #23Feedback

3Productivity

If computational efficiency is improved by using demodulated signals for cross-correlation, then processing speed increases, but implementation complexity increases

Engineering Contradiction:
Improvecomputational efficiencyVSAvoiddemodulation circuit complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent introduces demodulation as an intermediary step that simplifies the subsequent cross-correlation operation. By first demodulating the signals to remove carrier frequencies and extract baseband components, the cross-correlation operation becomes more computationally efficient. The demodulator acts as a mediator that transforms the signals into a form where frequency mismatch detection can be performed with reduced computational complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the computational efficiency and accuracy of detecting frequency mismatch, allowing for effective compensation and enhanced performance in detecting angular motion by isolating specific spectral characteristics of the gyroscope, thereby improving the gyroscope's ability to sense angular velocities.

Implementation Method 1

MEMS gyroscopes are configured to detect angular motion by sensing accelerations produced by Coriolis forces. Coriolis forces arise when a resonant mass of a MEMS gyroscope is subjected to angular motion.

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 2

The output signal may be generated by cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal can be obtained by allowing the noise signal to pass through a system designed to have a noise transfer function that mimics the frequency response of the gyroscope.

Methodology Applied
Scientific EffectCross-correlation:

Implementation Method 3

To improve computational efficiency, the cross-correlation can be performed on demodulated versions of the noise signal and the response signal.

Methodology Applied
Scientific EffectDemodulation:

Data Source

PatentUS10852136B2Frequency mismatch detection method for mode matching in gyroscopes
Publication Date: 2020.12.01 ANALOG DEVICES INC
  • US10852136B2 patent drawing
  • US10852136B2 patent drawing
  • US10852136B2 patent drawing

AI summary

A method for detecting frequency mismatch in microelectromechanical systems (MEMS) gyroscopes is described. Detection of the frequency mismatch between a drive signal and a sense signal may be performed by generating an output signal whose spectrum reflects the physical characteristics of the gyroscope, and using the output signal to determine the frequency fC of the sense signal. The output signal may be generated by cross-correlating a random or pseudo-random noise signal with a response signal, where the response signal can be obtained by allowing the noise signal to pass through a system designed to have a noise transfer function that mimics the frequency response of the gyroscope. Since the noise signal is random or pseudo-random, cross-correlating the noise signal with the response signal reveals spectral characteristics of the gyroscope. To improve computational efficiency, the cross-correlation can be performed on demodulated versions of the noise signal and the response signal.