MEMS Gyroscope Compensation via Multi-Frequency Self-Test

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

MEMS gyroscopes often experience measurement errors due to manufacturing variances and component wear, leading to changes in gain and frequency response that are not easily detectable with existing self-test methods.

Innovation Solution

A method involving driving the sense oscillator at multiple test frequencies distinct from the drive frequency to measure changes in frequency response, determining gain changes and frequency shifts, and compensating by modifying operational parameters to maintain accurate measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If existing self-test methods are used, then the gyroscope operates continuously, but measurement errors due to gain changes and frequency shifts are not detected

Engineering Contradiction:
Improvecontinuous operationVSAvoiddetection of gain changes and frequency shifts
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent implements periodic self-test cycles where the gyroscope alternates between normal measurement mode and self-test mode. During self-test, test signals are applied at specific frequencies to detect gain changes and frequency shifts. This periodic testing allows continuous operation while maintaining detection capability without requiring constant monitoring that would interfere with normal function.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent applies preliminary calibration and characterization to establish baseline gain and frequency response characteristics before normal operation begins. These pre-determined parameters are stored and used for comparison during operation, enabling detection of deviations without requiring real-time reference measurements that would consume resources during active use.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If multiple test frequencies are applied to detect frequency response changes, then detection accuracy improves, but system complexity increases

Engineering Contradiction:
Improvefrequency response detection accuracyVSAvoidtest signal generation and processing
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies different test frequencies selectively based on the specific parameters being tested. Rather than using a broad spectrum of frequencies for all tests, specific test frequencies are chosen to target specific aspects of frequency response (e.g., resonant frequencies, bandwidth edges). This localized approach maintains high detection accuracy while minimizing the number of test signals required.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent varies test signal parameters (frequency, amplitude, duration) based on the specific measurement objectives and operating conditions. Test frequencies are selected and adjusted according to the gyroscope's operational state, allowing adaptive optimization of detection accuracy without requiring a fixed complex test sequence for all conditions.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If self-test procedures are implemented, then measurement accuracy is maintained, but operational time is reduced due to testing intervals

Engineering Contradiction:
Improveaccuracy maintenanceVSAvoidoperational time during self-test
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent implements partial self-testing where only critical parameters (gain and frequency response) are tested at extended intervals rather than continuously monitoring all parameters. This selective testing approach maintains measurement accuracy for the most important parameters while minimizing the frequency of test interruptions, thereby preserving operational time.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The patent uses rapid test signal sequences that can be applied and measured quickly, minimizing the duration of each self-test cycle. By using efficient test waveforms and fast measurement techniques, the critical parameter checks are completed in minimal time, allowing the gyroscope to return to full operational mode quickly and maximizing overall operational time.

Inventive Principle:
Principle #21Skipping (Rushing through)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for effective detection and compensation of gain changes and frequency shifts in MEMS gyroscopes, enhancing measurement accuracy and reliability over time.

Implementation Method 1

driving the sense oscillator in a sense direction at a first test frequency simultaneously with driving the drive oscillator, and driving the sense oscillator in the sense direction at a second test frequency

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

determining a change in the frequency response of the sense oscillator at the first test frequency based on the first test response, determining a change in the frequency response of the sense oscillator at the second test frequency based on the second test response

Methodology Applied
Scientific EffectFrequency response measurement:

Implementation Method 3

compensating for the frequency shift and/or the gain change by modifying one or more operational parameters of the gyroscope based on the change in the frequency response

Methodology Applied
Scientific EffectFrequency stabilization:

Data Source

PatentEP3387379B1Two frequency gyroscope compensation system and method
Publication Date: 2020.07.22 INVENSENSE INC
  • EP3387379B1 patent drawingFigure 1
  • EP3387379B1 patent drawingFigure 2
  • EP3387379B1 patent drawingFigure 3

AI summary

A gyroscope is driven at a drive frequency and senses a Coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given Coriolis force may change due to changes in the gyroscope over time. A plurality of test frequencies are applied to the gyroscope, and the response of the gyroscope to those test frequencies is analyzed in order to track changes in the response of the gyroscope. Operational parameters of the gyroscope may be altered in order to compensate for those changes.