MEMS Gyroscope Quadrature Error Compensation

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Solution Overview

Problem

Existing MEMS gyroscope systems face challenges in compensating for quadrature errors, which are introduced during manufacturing and exacerbated by external mechanical stresses, as they can only be addressed during the production stage and not in real-time operational conditions.

Innovation Solution

A digital quadrature controller is integrated into the MEMS system to extract quadrature error signals using a quadrature clock, allowing for the generation and application of compensation signals to reduce quadrature errors, even when the system is operational and not measuring Coriolis force, thereby addressing errors dynamically.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If quadrature error compensation is performed only during production stage using one-time programmable memory, then manufacturing precision is improved, but the system cannot adapt to mechanical stresses and errors that occur during operational life

Engineering Contradiction:
Improvequadrature error compensationVSAvoidreal-time error compensation capability
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent transforms the static quadrature error compensation approach into a dynamic system by implementing real-time compensation during operational life. The system continuously monitors quadrature errors and applies compensation signals dynamically, allowing adaptation to changing mechanical stresses and environmental conditions that occur after production.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system performs self-diagnosis and self-compensation by automatically detecting quadrature errors during operation and generating appropriate compensation signals without external intervention. The micro-electro-mechanical system uses its own operational data to identify and correct errors, eliminating the need for external calibration equipment.

Inventive Principle:
Principle #25Self-service

2Measurement precision

If the system operates continuously to provide real-time compensation, then measurement precision is improved, but additional circuitry and processing increase device complexity

Engineering Contradiction:
Improveangular rate measurement accuracyVSAvoidcontrol circuitry and processing requirements
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the quadrature error compensation function with the existing operational amplification and signal processing circuits of the MEMS gyroscope. By integrating the compensation functionality into the existing signal path rather than adding completely separate circuits, the system achieves real-time compensation with minimal increase in overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The control circuitry is designed to perform multiple functions: it processes the primary gyroscope signal for angular rate measurement, extracts quadrature error components, generates compensation signals, and applies them in real-time. This multi-functionality reduces the need for dedicated separate circuits for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables continuous reduction of quadrature errors in MEMS devices, even after production, by identifying and compensating for mechanical stresses and manufacturing-induced errors in real-time, ensuring accurate angular rate measurements.

Implementation Method 1

System comprising a mechanical resonator and method therefor

Methodology Applied
Scientific EffectMechanical resonance: Resonance

Implementation Method 2

extract the quadrature error signal from the mechanical resonator measurement signal using a quadrature clock

Methodology Applied
Scientific EffectSignal demodulation:

Implementation Method 3

application of a compensation signal to reduce quadrature error in the mechanical resonator measurement signal

Methodology Applied
Scientific EffectError cancellation:

Data Source

PatentUS10401171B2System comprising a mechanical resonator and method therefor
Publication Date: 2019.09.03 STMICROELECTRONICS INT NV
  • US10401171B2 patent drawing
  • US10401171B2 patent drawing
  • US10401171B2 patent drawing

AI summary

A system is provided that includes a mechanical resonator, and an analog circuit coupled to the mechanical resonator. The analog circuit is arranged to receive a mechanical resonator measurement signal having a quadrature error from the mechanical resonator, and to extract a quadrature error signal from the mechanical resonator measurement signal using a quadrature clock. A digital quadrature controller is coupled to the analog circuit and is arranged to generate a quadrature error compensation signal from the extracted quadrature error signal and apply the quadrature error compensation signal to the mechanical resonator or the mechanical resonator measurement signal to reduce quadrature error in the mechanical resonator measurement signal error.