MEMS Gyroscope Timing Synchronized to Resonant Frequency Drift

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Solution Overview

Problem

MEMS gyroscopes face performance limitations due to temperature-induced variations in resonant frequency, leading to timing errors and bias shifts in measurement signals, as existing signal processing systems do not account for these variations effectively.

Innovation Solution

A signal processing system that utilizes a voltage controlled oscillator (VCO) and phase locked loops to generate periodic signals at multiples of the resonant frequency, allowing for synchronous sampling and drive signal generation, thereby compensating for frequency variations and reducing phase errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If an external oscillator of fixed frequency is used to derive sampling timing, then the device complexity is reduced, but timing errors and phase errors increase due to resonant frequency variations with temperature

Engineering Contradiction:
Improvesignal processing system complexityVSAvoidtiming accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent uses a phase-locked loop (PLL) that continuously monitors the resonant frequency of the MEMS resonator and adjusts the sampling clock frequency accordingly. The PLL compares the resonant frequency signal with a reference and generates a feedback signal to maintain synchronous sampling, thereby eliminating phase errors caused by temperature-induced frequency variations while keeping the system relatively simple.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The sampling clock frequency is made dynamic by deriving it from the resonant frequency of the MEMS resonator itself rather than using a fixed external oscillator. The system automatically adapts the sampling rate to match the resonant frequency variations, ensuring accurate timing without requiring complex external frequency synthesis equipment.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If the sampling rate is increased to capture more signal details, then the measurement precision improves, but the device complexity and processing requirements increase

Engineering Contradiction:
Improvesignal sampling accuracyVSAvoidsignal processing system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent samples the resonant frequency signal at exactly the resonant frequency rate rather than using a much higher oversampling rate. This partial action approach captures sufficient signal information for accurate measurement without the excessive processing burden of high-rate sampling, thereby maintaining measurement precision while limiting system complexity.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system ensures accurate sampling and drive signal generation, reducing phase errors and bias shifts, and maintaining synchronization with the resonant frequency, even with temperature changes, thereby improving the stability and accuracy of MEMS gyroscope measurements.

Implementation Method 1

a first phase locked loop, configured to receive the first periodic signal, and to generate a second periodic signal at a second multiple of the resonant frequency

Methodology Applied
Scientific EffectPhase locked loop synchronization: Feedback

Implementation Method 2

an analog-to-digital converter (ADC) configured to sample a primary pick off signal from the primary pick off transducer at a first rate set by the first periodic signal

Methodology Applied
Scientific EffectSynchronous sampling:

Implementation Method 3

a digital-to-analog converter (DAC) configured to receive the drive signal frequency from the digital signal processing system at a second rate set by the second periodic signal and to generate a drive signal waveform to be applied to the primary drive transducer

Methodology Applied
Scientific EffectSynchronous signal generation:

Implementation Method 4

a primary drive transducer for causing the vibrating structure angular rate sensor to oscillate at a resonant frequency

Methodology Applied
Scientific EffectElectromagnetic actuation: Electromagnetic Induction

Implementation Method 5

a primary pick off transducer for detecting oscillation of the vibrating structure angular rate sensor at the resonant frequency

Methodology Applied
Scientific EffectElectromagnetic sensing: Electromagnetic Induction

Implementation Method 6

a vibrating structure, a primary drive transducer for causing the vibrating structure angular rate sensor to oscillate at a resonant frequency

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP4089364B1Synchronous timing to MEMS resonant frequency
Publication Date: 2024.03.20 ATLANTIC INERTIAL SYST LTD
  • EP4089364B1 patent drawingFigure 1
  • EP4089364B1 patent drawingFigure 2
  • EP4089364B1 patent drawingFigure 3

AI summary

A signal processing system (100) for a vibrating structure angular rate sensor (101) having a vibrating structure (102) and primary drive (103) and pickoff (105) transducers for causing the vibrating structure angular rate sensor to oscillate at a resonant frequency, for detecting oscillation of the vibrating structure angular rate sensor (101). The signal processing system comprises a digital signal processing system (109) configured to set a drive signal frequency for the primary drive transducer (103), a voltage controlled oscillator (111) configured to receive an input indicative of the resonant frequency and to generate a first periodic signal at a first multiple of the resonant frequency, and a first phase locked loop (113), configured to receive the first periodic signal, and to generate a second periodic signal at a second multiple of the resonant frequency. The first and second periodic signals are used to control the operation of an analog-to-digital converter (ADC) (115) configured to sample the primary pick off signal and a digital-to-analog converter (DAC) (118) configured to generate a drive signal waveform applied to the primary drive transducer (103).