MEMS Gyroscope Rocker Coupling for Noise Resilience
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Solution Overview
Problem
Existing MEMS single-axis gyroscopes suffer from weak coupling between mass structures, leading to unreliable displacement ratios and susceptibility to acceleration shocks, which affects measurement accuracy.
Innovation Solution
A MEMS single-axis gyroscope design featuring an anchor point structure elastically connected with a sensing unit and a driving decoupling structure, utilizing rocker connecting pieces and elastic structures to ensure strong coupling between mass blocks, allowing for differential detection of external angular velocity while resisting external noise and maintaining torque balance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a double-mass butterfly wing structure is used, then measurement precision is improved, but coupling between mass structures becomes weak leading to unreliable displacement ratios
Solution Approach 1:
The gyroscope structure is divided into multiple mass blocks (first mass block, second mass block, third mass block) connected by rocker connecting pieces. This segmentation allows independent optimization of each mass block while maintaining strong coupling through the connecting pieces, resolving the contradiction between measurement precision and structural stability.
Solution Approach 2:
Rocker connecting pieces are introduced as intermediary elements between the mass blocks. These connecting pieces provide strong mechanical coupling while allowing the necessary relative movements for measurement, thus maintaining both measurement precision and structural stability simultaneously.
2Device complexity
If weak coupling between mass structures is present, then device complexity is reduced, but displacement ratio of mass blocks cannot be guaranteed
Solution Approach 1:
The rocker connecting pieces are designed with asymmetric connection points on the mass blocks, creating an asymmetric mechanical advantage ratio. This asymmetric design naturally enforces a specific displacement ratio between mass blocks through the mechanical geometry itself, eliminating the need for complex active control systems while guaranteeing the required displacement ratio.
3Ease of manufacture
If mass blocks are susceptible to acceleration shock, then ease of manufacture is improved, but measurement accuracy is affected
Solution Approach 1:
The gyroscope employs a differential measurement structure where multiple mass blocks are arranged to experience opposite acceleration shocks. By taking the differential signal between these mass blocks, the common-mode acceleration shocks are rejected, while the Coriolis effect signals are enhanced. This counterweight approach maintains manufacturing simplicity while improving measurement accuracy under shock conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances the signal-to-noise ratio and improves measurement accuracy by ensuring strong coupling between mass blocks, reducing the impact of external linear and angular accelerations, and maintaining a zero displacement ratio, thereby improving the device's redundancy and precision.
Implementation Method 1
Each of the plurality of mass blocks comprises a main body and an elastic structure connected with the main body
Implementation Method 2
each elastic structure comprises a first torsion beam and a second torsion beam perpendicularly intersecting with the first torsion beam
Implementation Method 3
The rocker connecting pieces are elastically connected with the anchor point structure
Implementation Method 4
The gyroscope uses the negative stiffness effect to tune the drive mode and the detection mode
Implementation Method 5
The gyroscope uses the negative stiffness effect to tune the drive mode and the detection mode
Data Source
AI summary
A MEMS single-axis gyroscope includes an anchor point structure, a sensing unit elastically connected with the anchor point structure, and a driving decoupling structure elastically connected with the anchor point structure and the sensing unit. The sensing unit includes a plurality of mass blocks arranged side by side and rocker connecting pieces. Each of the rocker connecting pieces is connected between corresponding two adjacent mass blocks. Connecting positions between each of the rocker connecting pieces and the corresponding two adjacent mass blocks are located on a same side of the line connecting the centers of the plurality of mass blocks. The MEMS single-axis gyroscope is able to perform differential detection, which resists interference of external electrical and mechanical noise, and improves a signal-to-noise ratio. By adjusting the rocker connecting pieces arranged between each two adjacent mass blocks, a total vector displacement of the plurality of mass blocks is zero.