MEMS Gyroscope Sensitivity via Segmented Detection Capacitors
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Solution Overview
Problem
MEMS out-of-plane swing gyroscopes have a small detection capacitor, resulting in low sensitivity for angular velocity detection.
Innovation Solution
A MEMS gyroscope design featuring a substrate with first and second units connected by coupling springs, each unit comprising weights and coupling structures connected by elastic beams, enhancing sensitivity through improved detection capacitor design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the MEMS out-of-plane swing gyroscope uses a conventional detection capacitor design, then the device structure is simple, but the sensitivity is low
Solution Approach 1:
The detection capacitor is segmented into multiple capacitors arranged in series along the swing direction. Each capacitor contributes to the total capacitance change, effectively increasing the overall sensitivity of the detection system without requiring a single large capacitor that would increase device area.
Solution Approach 2:
Multiple detection capacitors are combined in series configuration to achieve cumulative sensitivity enhancement. The patent merges the detection function across multiple capacitor elements, where the total capacitance change is the sum of individual capacitor changes, thereby increasing overall sensitivity while maintaining a compact structure.
2Measurement precision
If the detection capacitor size is increased to improve sensitivity, then the sensitivity increases, but the device area increases
Solution Approach 1:
The patent transitions from a single large capacitor design to multiple smaller capacitors arranged in a linear series configuration along the swing direction. This dimensional arrangement allows the sensitivity to be increased through the number of capacitors rather than through the size of individual capacitors, thereby maintaining a compact device footprint while achieving enhanced sensitivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced design increases the sensitivity of the MEMS gyroscope, allowing for more accurate detection of angular velocity by improving the detection capacitor's performance.
Implementation Method 1
the first set of coupling structures is connected with the first weight and the second weight through the first set of elastic beams
Implementation Method 2
a first unit and a second unit arranged on the substrate along a first direction, the first unit being connected with the second unit through a coupling spring
Implementation Method 3
When an angular velocity Ω is applied, the gyroscope transfers energy to the detection mode due to the Coriolis effect, causing the weight structure to oscillate out-of-plane in relative drive
Data Source
AI summary
The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.