MEMS Gyroscope Tri-Axis Sensing via Flexible Coupling
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Solution Overview
Problem
Existing microelectromechanical systems (MEMS) gyroscopes face challenges in accurately measuring three-axis angular velocities due to difficulties in driving masses in different directions within a tiny structure while controlling costs and minimizing noise and non-ideal signals.
Innovation Solution
The design incorporates plural drive shafts connected through flexible elements to outer frames, which are connected to sensing modules via transmission pieces, allowing the external forces to be coupled and improving the accuracy of three-axis measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple mass blocks are used to sense three-axis angular velocities, then measurement capability is improved, but device complexity and cost increase
Solution Approach 1:
Multiple mass blocks are integrated into a unified outer frame structure, where the outer frame itself serves as a common support for all mass blocks. This merging approach allows three-axis angular velocity sensing to be achieved through a single integrated structure rather than separate independent sensing elements, thereby reducing overall device complexity while maintaining full measurement capability.
Solution Approach 2:
The outer frame is designed to serve multiple functions simultaneously: it acts as a structural support for mass blocks, provides a common reference frame for all sensing operations, and enables coupling of external forces from multiple drive shafts. This multi-functionality allows a single component to replace what would traditionally require multiple separate elements, reducing device complexity.
2Measurement precision
If mass blocks are driven in different directions, then three-axis measurement accuracy is improved, but noise and non-ideal signals increase
Solution Approach 1:
The outer frame serves as an intermediary structure that mediates between multiple drive shafts and the mass blocks. By providing a common rigid reference frame, it ensures that driving forces are applied in precisely controlled directions while isolating the mass blocks from mechanical imperfections and noise generated by the drive mechanisms. This intermediary structure enables accurate three-axis measurement while filtering out non-ideal signals.
3Measurement precision
If external forces are coupled through outer frames, then measurement accuracy is improved, but manufacturing complexity increases
Solution Approach 1:
The gyroscope is segmented into distinct functional modules: drive shafts, outer frames, and mass blocks with sensing elements. Each module can be manufactured and tested independently before final assembly. The outer frame is designed as a separate component that couples external forces from drive shafts to the mass blocks, allowing for specialized manufacturing processes optimized for each segment's specific requirements, thereby reducing overall manufacturing complexity despite the advanced measurement capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the accuracy of three-axis angular velocity sensing, reduces noise, and maintains cost-effectiveness by stabilizing the microelectromechanical structure and effectively managing external forces.
Implementation Method 1
plural driving shafts are disposed among the outer frames that connect to two adjacent outer frames through a first flexible connecting element and a second flexible connecting element
Implementation Method 2
When a mass moves linearly along an axis and bears an angular velocity, the mass block may sense a Coriolis force. The force drives the mass block to generate displacement in a direction perpendicular to the an axial direction of the axis
Data Source
AI summary
The invention related to a microelectromechanical systems gyroscope, which comprises a plurality of sensing modules sensing angular velocities on tri-axes, a plurality of outer frames set at outside of the sensing modules, and a plurality of driving shafts set between the frames respectively. The driving shafts are connected with two adjacent frames by first and second flexible connecting elements, respectively, and the frames are connected with the sensing modules by a plurality of transporting units. Thus, tri-axes sensing is provided.