Hand-Assembled MEMS Components With Tactile Feedback

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Solution Overview

Problem

Microfabrication techniques are ill-suited for producing large, complex 3-D meso-scale devices due to their two-dimensionality and limited depth of vision, leading to difficulties in joining discrete components with precision and increasing complexity, which results in misalignments and high assembly costs.

Innovation Solution

The development of a hand-assemblable MEMS apparatus using microfabricated components with integrated spring members, cam surfaces, abutments, and tactile feedback members that allow for precise alignment and assembly without requiring high-precision equipment, enabling the assembly of meso-scale components with micrometer-level precision using low-precision manual techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If microfabrication techniques are used to produce meso-scale 3-D assemblies, then manufacturing precision is improved, but device complexity increases and ease of manufacture deteriorates

Engineering Contradiction:
Improvemicrometer level precisionVSAvoidcomplexity of 3-D features
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention divides the meso-scale device into multiple discrete microfabricated components that are fabricated separately using microlithography and then assembled together. This segmentation allows each component to be manufactured with high precision using 2-D microlithographic techniques while avoiding the complexity of fabricating large 3-D features in a single monolithic structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from 2-D microlithographic fabrication to 3-D assembled structures by fabricating flat components with 2-D precision and then joining them to create 3-D configurations. This dimensionality change enables the creation of complex 3-D devices using simple 2-D fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If discrete components are joined to form larger assemblies, then ease of manufacture is improved, but manufacturing precision deteriorates

Engineering Contradiction:
Improveability to fabricate larger assembliesVSAvoidalignment precision of components
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention incorporates preliminary alignment features directly into the microfabricated components during the fabrication process. These features include protrusions, recesses, and geometric shapes that automatically guide and position components relative to each other during assembly, ensuring precise alignment without requiring high-precision assembly equipment.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The components are designed to self-align and self-assemble through their own geometric features. The interlocking shapes and alignment structures enable the components to find their correct positions automatically during manual assembly, eliminating the need for external alignment tools or complex positioning systems.

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If high precision assembly systems are used to join discrete components, then manufacturing precision is improved, but device complexity and cost increase

Engineering Contradiction:
Improveprecision of component joiningVSAvoidcomplexity of assembly equipment
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention makes the components themselves responsible for achieving precise alignment through their own geometric features, rather than relying on complex external assembly equipment. The self-aligning structures enable manual assembly with simple tools while maintaining micrometer-level precision.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Alignment features are built into the components during fabrication, performing the alignment function in advance before assembly. This preliminary incorporation of alignment functionality eliminates the need for complex real-time alignment systems during the assembly process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the precise assembly of microfabricated components into meso-scale assemblies with tens of microns accuracy, decoupling the fabrication processes of components and enabling the use of temperature-sensitive materials, while providing protection against over-tightening and damage during assembly.

Implementation Method 1

A microfabricated spring member integrally disposed on one of the first and second components, and configured to bias the other component towards the assembled orientation

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

A cam surface integrally disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Implementation Method 3

A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentUS7900336B2Precise hand-assembly of microfabricated components
Publication Date: 2011.03.08 MASSACHUSETTS INST OF TECH
  • US7900336B2 patent drawing
  • US7900336B2 patent drawing
  • US7900336B2 patent drawing

AI summary

A hand assembled MEMS apparatus includes meso-scale microfabricated components adapted for being moved by hand relative to one another from a loose-fit preliminary alignment orientation to a relatively tight-fit assembled orientation. A microfabricated spring member is integrally disposed on one of the components to bias the other component towards the assembled orientation. A cam surface disposed on the other component is configured to slidably engage and move the spring member against its bias upon continued hand movement in the assembly direction. A microfabricated abutment is disposed to limit relative movement of the components in at least one direction other than the assembly direction. A microfabricated tactile feedback member is configured to disrupt the hand movement in the assembly direction once the components have substantially reached the assembled orientation.