Piezoelectric MEMS Resonator Control of High-Order Harmonics
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Solution Overview
Problem
Current MEMS resonators struggle to effectively control high order harmonic frequencies generated in the non-linear region, which is crucial for compact size, low power consumption, and high accuracy in electronic devices.
Innovation Solution
A method involving a piezoelectric resonant film driven by a single tone frequency or a frequency sweep range, with optional DC bias, to oscillate in a non-linear region, generating high order harmonic frequencies by utilizing equivalent high and low stiffness regions and controlling the driving signal and DC bias to adjust the quantity of these frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a MEMS resonator operates in a non-linear region to generate high order harmonic frequencies, then the frequency generation capability is improved, but the control precision of the generated frequencies deteriorates
Solution Approach 1:
The patent applies parameter changes by adjusting the driving signal characteristics (amplitude, frequency) and DC bias voltage to control the quantity and distribution of generated harmonic frequencies. By changing these parameters, the system can operate in the non-linear region to generate harmonics while maintaining control precision through optimized parameter selection.
Solution Approach 2:
The patent employs feedback mechanisms to monitor and control the generated harmonic frequencies. By measuring the actual frequency output and adjusting the driving signal and DC bias accordingly, the system maintains precise control over the harmonic generation process even in the non-linear operating region.
2Volume of moving object
If a quartz oscillator is replaced by a MEMS resonator to reduce size, then the compactness is improved, but the reliability and accuracy deteriorate
Solution Approach 1:
The patent optimizes the MEMS resonator's operational parameters including driving signal amplitude, frequency, and DC bias voltage to enhance reliability. By carefully selecting and adjusting these parameters, the system achieves stable operation in the non-linear region, improving the reliability and accuracy of the compact MEMS device.
Solution Approach 2:
The patent utilizes the dynamic characteristics of the MEMS resonator by operating it in the non-linear region where dynamic effects enable harmonic frequency generation. This dynamic operation mode allows the compact MEMS structure to achieve functionality previously requiring larger, more reliable quartz oscillators.
3Adaptability or versatility
If a MEMS resonator operates in a non-linear region to generate multiple frequencies, then the functionality is improved, but the difficulty of controlling the quantity of harmonic frequencies increases
Solution Approach 1:
The patent simplifies the control of harmonic quantity by adjusting key parameters such as DC bias voltage and driving signal amplitude. By changing these parameters, the system can control the number and strength of generated harmonics, reducing control complexity while maintaining multi-frequency generation capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise control and generation of high order harmonic frequencies, enhancing the performance of MEMS resonators in terms of compactness, efficiency, and reliability for electronic devices.
Implementation Method 1
providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate
Data Source
AI summary
A method for generating high order harmonic frequencies includes: providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies. Therefore, the quantity of the high order harmonic frequencies can be adjusted by applying an electrical controlling method.