MEMS Sample Holder With Size-Selective Filtration for Liquid TEM Prep
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Solution Overview
Problem
Current TEM/STEM sample preparation methods are time-consuming, require highly skilled operators, and lack standard quality inspection, making them inefficient and prone to errors, especially for small particle separation and liquid sample handling.
Innovation Solution
A MEMS sample holder with a sample compartment and windows for electron beam observation, incorporating a filter and circumventing tunnels to separate particles by size, allowing for automated liquid sample preparation without the need for a highly skilled operator.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual sample preparation methods are used, then sample quality can be maintained, but the process is time-consuming and requires highly skilled operators
Solution Approach 1:
The patent replaces manual mechanical sample preparation operations with an automated MEMS-based system. The MEMS sample holder incorporates integrated filters and fluidic channels that automatically separate particles by size and deliver liquid samples to the observation area, eliminating the need for manual manipulation while maintaining sample quality.
Solution Approach 2:
The MEMS sample holder performs self-service functions by automatically filtering particles through integrated size-based filters and circulating liquid samples through microfluidic channels. The device prepares and maintains samples without external intervention, reducing both preparation time and operator skill requirements.
2Adaptability or versatility
If manual sample preparation is used, then flexibility is maintained, but particle separation by size cannot be achieved
Solution Approach 1:
The patent incorporates porous filter structures within the MEMS sample holder that enable size-based particle separation. These filters allow selective passage of particles based on their dimensions, achieving precise separation that cannot be accomplished through manual preparation methods.
Solution Approach 2:
The patent introduces microfluidic channels and integrated filters as intermediary structures between the sample reservoir and the observation area. These intermediaries automatically guide and separate particles by size, providing precise control over which particles reach the observation region without requiring manual intervention.
3Productivity
If automated MEMS sample holder is used, then preparation time is reduced, but device complexity increases
Solution Approach 1:
The patent merges multiple sample preparation functions into a single integrated MEMS device. The sample holder combines filtering, fluidic circulation, and observation capabilities in one compact structure, reducing overall system complexity despite the advanced functionality provided by each integrated component.
Solution Approach 2:
The MEMS sample holder is designed as a multi-functional device that can handle various liquid samples, perform size-based filtration, and accommodate different observation requirements. This universality allows a single device design to replace multiple specialized tools, justifying the increased complexity through enhanced productivity and versatility.
Data Source
AI summary
The present invention provides a MEMS sample holder comprising an observation section. The observation section includes a first layer, a second layer, and a sample compartment between the first layer and the second layer. The sample compartment is configured for filling a liquid sample and observing the liquid sample filled therewithin. The sample compartment has one, two or more windows through which an electron beam can pass. Each of the windows is formed on two cavities including a first cavity on the first layer and a second cavity on the second layer that is opposite to the first cavity across the sample compartment.