MEMS Inertial Sensor Support Part Segmentation for Warping
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Solution Overview
Problem
Existing inertial sensors using MEMS technology are susceptible to detection accuracy drops due to external stress and thermal stress-induced warping of the base substrate, particularly because the support parts are widely spaced, leading to reduced precision in acceleration detection.
Innovation Solution
The inertial sensor design includes a substrate with a fixing part and a moving element that swings about a rotation axis, supported by a support beam and a support part with a longer second part not fixed to the fixing part, which reduces the influence of substrate warping and enhances impact resistance by providing a larger contact area for absorbing impacts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the two support parts serving as the axes of rotation are arranged on both sides of the sensor part and are widely spaced apart from each other, then the structural stability is improved, but the susceptibility to the influence of a warp of the base substrate due to an external stress or a thermal stress increases, causing a drop in the detection accuracy
Solution Approach 1:
The support part is divided into two distinct portions: a first part fixed to the fixing part and a second part not fixed to the fixing part. This segmentation allows the first part to provide stable support while the longer second part compensates for substrate warping, thus resolving the contradiction between structural stability and measurement precision
Solution Approach 2:
Different portions of the support part have different properties: the first part is fixed and provides stable support, while the second part is longer and not fixed, allowing it to accommodate substrate warping. This local differentiation enables the support structure to simultaneously achieve stability and resist warping-induced errors
2Strength
If the support part has a longer second part not fixed to the fixing part, then the impact resistance is improved by providing a larger contact area for absorbing impacts, but the device complexity increases
Solution Approach 1:
The support part is segmented into a fixed first part and a longer non-fixed second part. This segmentation provides a larger contact area for impact absorption while maintaining a relatively simple overall structure that integrates seamlessly with the existing sensor components
Solution Approach 2:
The support part combines both the fixed first part and the non-fixed second part into a single integrated component, merging the functions of support and impact absorption without requiring additional separate structures, thus avoiding excessive complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves detection accuracy and impact resistance by minimizing the effect of substrate warping and allowing for miniaturization of the sensor while maintaining sensitivity and reliability.
Implementation Method 1
a moving element 30 having an opening 43 and configured to swing about a rotation axis J along a Y-direction
Implementation Method 2
a support beam 35 supporting the moving element 30 as the rotation axis J in the opening 43 of the moving element 30
Implementation Method 3
a support part 32 supporting the support beam 35. The support part 32 has a first part 33 fixed to the fixing part 22, and a second part 34 formed only of a part not fixed to the fixing part 22. A length L2 in the Y-direction of the second part 34 is longer than a length L1 in the Y-direction of the first part 33
Data Source
AI summary
An inertial sensor includes: a substrate; a fixing part arranged at one surface of the substrate; a moving element having an opening and configured to swing about a rotation axis along a first direction; a support beam supporting the moving element as the rotation axis in the opening of the moving element; and a support part supporting the support beam. The support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part. A length in the first direction of the second part is longer than a length in the first direction of the first part.