MEMS Integrated Membrane Nozzle Manufacturing Process
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Solution Overview
Problem
Existing inhaler membranes with nozzles face challenges in reproducibility and manufacturing complexity, which affect the consistency and directionality of medicament delivery in aerosol therapies.
Innovation Solution
A process using MEMS technology to fabricate an integrated membrane of nozzles with uniform dimensions, involving a substrate, membrane layer, and supply channels aligned vertically with nozzles, optimized through sacrificial layer management and etching techniques to ensure high reproducibility and reduced production costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional membrane manufacturing methods are used, then manufacturing complexity is reduced, but nozzle uniformity and reproducibility deteriorate
Solution Approach 1:
The manufacturing process is divided into distinct sequential steps: forming the membrane layer, forming nozzles in the membrane layer, forming supply channels in the substrate, and removing the sacrificial layer. This segmentation allows each step to be optimized independently, achieving high nozzle uniformity through controlled etching processes while maintaining overall process manageability.
Solution Approach 2:
A sacrificial layer is deposited on the substrate before forming the membrane layer and nozzles. This preliminary action enables subsequent selective removal to create vertical alignment between nozzles and supply channels, achieving precise geometric control without requiring complex multi-step alignment procedures.
2Reliability
If complex manufacturing processes are used, then nozzle reproducibility is improved, but manufacturing cost and complexity increase
Solution Approach 1:
The sacrificial layer serves multiple functions: it acts as a template for nozzle formation, provides structural support during membrane layer formation, enables vertical alignment of supply channels with nozzles, and is selectively removed to complete the integration. This multi-functionality achieves high reproducibility without proportionally increasing process complexity.
Solution Approach 2:
The process merges the formation of nozzles and supply channels into an integrated manufacturing sequence rather than separate steps. By forming nozzles in the membrane layer and supply channels in the substrate simultaneously, then removing the sacrificial layer to align both features vertically, the process reduces overall complexity while maintaining high reproducibility.
3Ease of operation
If nozzles are formed with precise dimensions, then aerosol delivery consistency is improved, but manufacturing precision requirements increase
Solution Approach 1:
The process uses controlled etching parameters (depth, width, shape) to define nozzle dimensions. By adjusting etching conditions and sacrificial layer thickness, precise nozzle dimensions are achieved without requiring extremely tight tolerances in earlier manufacturing steps, thereby maintaining ease of operation while ensuring consistent aerosol delivery.
Data Source
AI summary
A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.