Differential MEMS Sensor Interface for Common-Mode Noise Rejection

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Solution Overview

Problem

MEMS sensors with single-ended architectures struggle to distinguish between common-mode noise and actual signals due to poor power supply rejection ratio (PSRR) and electromagnetic compatibility (EMC) interference, leading to ineffective signal amplification.

Innovation Solution

Implementing a differential architecture for the MEMS interface circuit with a feedback control circuit that cancels common-mode signals by matching the capacitance of the MEMS transducer with an on-chip variable capacitor, allowing the feedback signal to be used to reject noise and interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single-ended architecture is used for the MEMS interface circuit, then the device complexity is reduced, but the power supply rejection ratio (PSRR) and noise suppression capability deteriorate

Engineering Contradiction:
Improvecircuit architecture complexityVSAvoidpower supply rejection ratio
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent divides the interface circuit into differential signaling paths, separating the signal transmission into distinct differential pairs that can independently handle common-mode noise rejection while maintaining manageable circuit complexity through modular differential amplifier stages

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements feedback control circuits that monitor the differential signals and actively adjust the circuit operation to maintain optimal PSRR performance, using the output signals to regulate the differential amplifier operation and compensate for power supply variations

Inventive Principle:
Principle #23Feedback

2Device complexity

If a single-ended architecture is used for the MEMS interface circuit, then the circuit design is simplified, but the electromagnetic compatibility (EMC) interference suppression deteriorates

Engineering Contradiction:
Improvecircuit design complexityVSAvoidEMC interference
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent segments the signal paths into differential pairs that are inherently more resistant to EMC interference, with each differential pair handling specific signal components and providing natural immunity to electromagnetic disturbances through balanced signaling

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs asymmetric filtering and signal processing in the differential paths, where different frequency components and signal types are handled by specialized differential amplifier stages with tailored characteristics to optimize EMC performance

Inventive Principle:
Principle #4Asymmetry

3Reliability

If a differential architecture is implemented with feedback control circuit, then the common-mode signal suppression is improved, but the device complexity increases

Engineering Contradiction:
Improvecommon-mode signal suppressionVSAvoidinterface circuit complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent uses feedback control circuits that take the differential output signals and feed them back to regulate the operation of the differential amplifiers, actively suppressing common-mode signals through closed-loop control while managing the increased complexity through efficient feedback topology

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent combines multiple functions into integrated differential amplifier stages that perform amplification, common-mode rejection, and feedback control in unified circuit blocks, reducing the overall complexity despite the advanced functionality required for effective common-mode suppression

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses common-mode signals, improving signal-to-noise ratio and enhancing the ability to amplify actual signals while reducing noise and interference.

Implementation Method 1

the variable capacitor of the MEMS microphone changes its capacitance in dependence on a sound pressure impacting on the microphone

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

matching the capacitance of the MEMS transducer with an on-chip variable capacitor

Methodology Applied
Scientific EffectCapacitance matching: Capacitance

Data Source

PatentEP3331160B1MEMS sensor
Publication Date: 2021.04.28 AMS INTERNATIONAL AG
  • EP3331160B1 patent drawingFigure 1
  • EP3331160B1 patent drawingFigure 2
  • EP3331160B1 patent drawingFigure 3

AI summary

A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (1200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (1200a, 1200b) of the differential amplifier (200) and is therefore rejected.