MEMS Interference Reconstruction Circuit for Thermal Cross-Talk

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Solution Overview

Problem

Micro-Electro-Mechanical Systems (MEMS) circuits face interference issues due to temperature changes caused by external components, leading to corrupted measurement signals, particularly in environments with power amplifiers or antennas, where heat transfer affects sensor accuracy.

Innovation Solution

A MEMS circuit with a control circuit to detect the switched-on or switched-off state of nearby devices, a reconstruction filter to determine interference signals, and a subtractor to remove these signals from the MEMS signal, thereby minimizing thermal interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If multiple sensors are accommodated in a common package, then integration density is improved, but thermal cross-talk between sensors worsens

Engineering Contradiction:
Improveintegration densityVSAvoidthermal cross-talk
Core Design Contradiction:
Area of moving objectVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediary compensation circuit that detects temperature changes caused by power loss and generates compensating signals to counteract thermal cross-talk effects on sensors, thereby maintaining measurement accuracy despite close proximity in a common package

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system employs feedback mechanisms where the compensation circuit continuously monitors temperature variations and adjusts compensating signals in real-time to counteract thermal interference, creating a closed-loop system that maintains sensor performance despite thermal cross-talk

Inventive Principle:
Principle #23Feedback

2Adaptability or versatility

If electronic components are placed near MEMS, then device functionality is improved, but measurement signal accuracy worsens due to thermal interference

Engineering Contradiction:
Improvedevice functionalityVSAvoidmeasurement signal accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent segments the measurement system into distinct functional blocks: the MEMS sensor block, the power amplifier block, and the compensation circuit block. This segmentation allows each component to perform its function while the compensation circuit specifically addresses thermal interference without affecting other components

Inventive Principle:
Principle #1Segmentation

3Power

If power amplifiers operate at high power, then signal transmission capability is improved, but thermal influence on MEMS sensors worsens

Engineering Contradiction:
Improvesignal transmission capabilityVSAvoidthermal influence
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

The compensation circuit performs preliminary detection of temperature changes caused by power amplifier operation and pre-generates compensating signals before the thermal interference fully affects the MEMS sensors, thereby proactively counteracting the thermal influence rather than merely responding to it

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces thermal cross-talk by up to 15 dB, enhancing the independence of the measuring system from ambient influences and improving signal accuracy by compensating for temperature-related interference.

Implementation Method 1

a mutual influencing of the sensors, for example as a result of a thermal power loss, can occur

Methodology Applied
Scientific EffectThermal cross-talk: Thermal Radiation

Implementation Method 2

a subtractor configured to subtract the determined interference signal from the MEMS signal

Methodology Applied
Scientific EffectSignal subtraction:

Data Source

PatentUS10491996B2Micro-electro-mechanical system (MEMS) circuit and method for reconstructing an interference variable
Publication Date: 2019.11.26 INFINEON TECHNOLOGIES AG
  • US10491996B2 patent drawing
  • US10491996B2 patent drawing
  • US10491996B2 patent drawing

AI summary

A Micro-Electro-Mechanical System (MEMS) circuit and a method for reconstructing an interference variable are provided. The MEMS circuit includes a MEMS device configured to generate a MEMS signal; a control circuit configured to detect a switched-on state or switched-off state of at least one device and configured to generate a control signal at least partly depending on the switched-on state or the switched-off state; a reconstruction filter configured to determine an interference signal that is partly generated by the at least one device, using the generated control signal; and a subtractor configured to subtract the determined interference signal from the MEMS signal.