MEMS Interferometer with Uncooled Metasurface Detector

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Infrared spectrometers face challenges in miniaturization for downhole applications due to size and thermal constraints, particularly in oilfield sensing where environmental conditions exceed 175°C and 200 MPa, and are not amenable to integration with cryogenic cooling systems typical of laboratory-grade detectors.

Innovation Solution

A micro-electromechanical system (MEMS) interferometer with an uncooled near-zero index metasurface detector, utilizing a metasurface microbolometer and displacement amplification mechanism, enabling laboratory-quality detectivity at elevated temperatures without cryogenic cooling, integrated on a single chip for real-time chemical analysis in downhole environments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If cryogenic cooling systems are integrated into infrared spectrometers, then detector sensitivity and spectral resolution are improved, but device size and thermal control complexity increase, making it infeasible for downhole applications

Engineering Contradiction:
Improvespectral resolutionVSAvoidthermal control complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts and removes the cryogenic cooling system from the infrared spectrometer, replacing it with an uncooled detector that operates at ambient downhole temperatures. This eliminates the complex thermal control machinery while maintaining spectral resolution through the use of a specialized uncooled microbolometer detector designed for high sensitivity without active cooling.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the operational temperature parameter of the detector from cryogenic temperatures to ambient downhole temperatures. The uncooled microbolometer is specifically designed to operate at elevated temperatures (up to 175°C), fundamentally altering the thermal operating conditions while preserving measurement precision through materials and design optimized for high-temperature sensitivity.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If laboratory-grade detectors with cryogenic cooling are used, then detectivity is improved, but the sensor package size exceeds the constraints for downhole logging applications

Engineering Contradiction:
ImprovedetectivityVSAvoidsensor package volume
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent nests the infrared detector and interferometer components into a compact integrated sensor package that fits within downhole logging constraints. The uncooled microbolometer is integrated with the interferometer in a nested configuration, allowing high detectivity components to be contained within a small volume suitable for downhole deployment.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent replaces the mechanical cryogenic cooling system with an uncooled detector technology that achieves comparable detectivity through electronic and optical design rather than thermal management. This substitution eliminates the bulky cooling machinery while maintaining measurement performance through advanced uncooled detector materials and interferometer optimization.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Volume of moving object

If the interferometer is miniaturized for downhole applications, then device size is reduced, but maintaining spectral resolution and detectivity becomes more difficult

Engineering Contradiction:
Improveinterferometer sizeVSAvoidspectral resolution
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The patent segments the interferometer into compact MEMS-based components with movable mirrors that can achieve the necessary optical path difference in a minimized volume. The interferometer is divided into discrete functional elements that can be precisely controlled to maintain spectral resolution despite the reduced overall size of the device.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent replaces traditional mechanical interferometer components with MEMS (micro-electromechanical systems) technology, enabling miniaturization while preserving spectral resolution through precise micro-scale mirror positioning and control. The MEMS interferometer achieves laboratory-grade performance in a compact form factor suitable for downhole applications.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS interferometer achieves high spectral resolution and detectivity comparable to cryogenically cooled detectors, enabling real-time chemical analysis of hydrocarbons in downhole environments with reduced size and thermal sensitivity, overcoming the limitations of existing technologies.

Implementation Method 1

The mechanism includes an electrostatic actuator driving a displacement amplification mechanism

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

a beam splitter that is positioned at an intersection of the perpendicular axes extending through each movable mirror

Methodology Applied
Scientific EffectLight reflection and transmission: Reflection

Implementation Method 3

A pair of movable mirrors that are positioned along perpendicular axes

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 4

a metasurface microbolometer placed in line with the beam splitter to measure an intensity of a recombined beam

Methodology Applied
Scientific EffectRadiation absorption: Absorption (EM radiation)

Data Source

PatentUS11774289B2Micro-electromechanical system (MEMS) interferometer for FT-MIR spectroscopy
Publication Date: 2023.10.03 SAUDI ARABIAN OIL CO
  • US11774289B2 patent drawing
  • US11774289B2 patent drawing
  • US11774289B2 patent drawing

AI summary

A microelectromechanical (MEMS) interferometer is provided. The MEMS interferometer includes a pair of movable mirrors that are positioned along perpendicular axes, wherein each of the pair of movable mirrors is coupled to a mechanism. The mechanism includes an electrostatic actuator driving a displacement amplification mechanism, and the displacement amplification mechanism driving each of the pair of the movable mirrors. The MEMS interferometer includes a beam splitter that is positioned at an intersection of the perpendicular axes extending through each movable mirror and the beam splitter. The MEMS interferometer also includes a metasurface microbolometer placed in line with the beam splitter to measure an intensity of a recombined beam from the pair of movable mirrors.