MEMS Laser Scanning for High-Resolution 3D TOF Mapping

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Solution Overview

Problem

Existing laser scanner systems face limitations such as bulky mechanical components, high power consumption, limited operational frequency, and restricted maximum application distance due to mechanical scanning methods and flash LIDAR's high power requirements and sensor resolution dependencies.

Innovation Solution

A laser scanner system utilizing a beam steering arrangement with microelectromechanical mirrors and sensors arranged in a grid, allowing for efficient scanning by varying light pulse directions and compensating for geometrical distortions, enabling high-resolution 3D mapping with reduced mechanical bulk and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If mechanical scanning methods (rotating mirrors, gimbals) are used to scan laser beams, then the system can achieve 2D or 3D environmental mapping, but the system becomes bulky, consumes high power, and has limited operational frequency due to mechanical wear and inertia

Engineering Contradiction:
Improvescanning capabilityVSAvoidmechanical components
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces mechanical scanning systems (rotating mirrors, gimbals, motors) with an optical phased array system that uses electronic phase modulation of laser beams. The beam steering is achieved through optical path difference control rather than mechanical movement, eliminating bulky mechanical components and enabling faster, wear-free operation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a beam steering arrangement with multiple steerable beams as an intermediary between the laser source and target. This arrangement uses optical phase modulation to redirect beams electronically without mechanical moving parts, serving as a mediator that achieves scanning functionality while avoiding mechanical complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If flash LIDAR with diffractive optics is used to illuminate full scene, then the system can capture entire environment at once, but the laser power required increases quadratically with distance and limits maximum application range to 5-10 meters

Engineering Contradiction:
Improvescanning speedVSAvoidlaser power consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent divides the scanning task into multiple steerable laser beams that can be independently controlled and directed at different spatial locations. Instead of illuminating the entire scene simultaneously with high power, the system segments the field of view and uses multiple lower-power beams that can be sequentially or parallelly steered to cover the environment, reducing total power requirements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs periodic steering of laser beams across different directions and positions. The beam steering arrangement cyclically redirects beams to scan different regions of the environment over time, enabling complete environmental mapping through time-multiplexed periodic scanning rather than simultaneous full-scene illumination.

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If single laser single sensor systems use pulse time interval greater than maximum distance TOF, then the system avoids TOF measurement ambiguity, but the throughput is limited and applicability for high distances is restricted

Engineering Contradiction:
ImproveTOF measurement accuracyVSAvoidsystem throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent segments the measurement process by using multiple sensors in an array that can simultaneously detect reflected light from different spatial positions. This parallel detection capability allows the system to maintain high throughput while using shorter pulse intervals, as each sensor independently measures TOF for its corresponding beam direction without requiring long intervals to avoid ambiguity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent adds spatial dimensionality by using a two-dimensional array of sensors that corresponds to a two-dimensional array of steerable beams. This spatial multiplexing allows simultaneous measurements across multiple directions, effectively increasing throughput by utilizing the spatial dimension rather than being constrained to sequential single-point measurements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Measurement precision

If array of sensors with grid arrangement is used for flash LIDAR, then the system can calculate TOF for corresponding parts of illuminated scene, but the mapping resolution depends on sensor array resolution and requires expensive high-resolution sensors

Engineering Contradiction:
Improveenvironmental mapping resolutionVSAvoidsensor array requirements
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces dynamic beam steering capability that allows the system to adaptively adjust beam directions and focus on regions of interest. The beam steering arrangement can dynamically reposition beams and adjust scanning patterns based on environmental features, enabling high-resolution mapping without requiring a permanently high-resolution sensor array, as resolution is achieved through temporal sampling and adaptive scanning.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves high-resolution 3D mapping with improved throughput and extended maximum detection range, suitable for applications like autonomous navigation and augmented reality, while minimizing mechanical complexity and power usage.

Implementation Method 1

a first microelectromechanical, MEMS, mirror configured to oscillate around a first axis with a first oscillating angle, and a second MEMS mirror configured to oscillate around a second axis with a second oscillating angle

Methodology Applied
Scientific EffectOscillation: Harmonic Oscillator

Implementation Method 2

a MEMS lens configured to vary the direction of transmission of the light pulses within each grid cell in the portioned FOV of the array of sensors

Methodology Applied
Scientific EffectOptical focusing and beam steering: Lens

Implementation Method 3

configured to sense a light pulse incident thereon in response to reflection of at least one light pulse of the beam of light pulses from a field of view, FOV, region in the target and configured to provide a signal indicative of a time of incidence thereon of at least one light pulse

Methodology Applied
Scientific EffectTime of flight measurement: Time of Flight

Data Source

PatentEP4124883B1Apparatus and method of laser scanning
Publication Date: 2025.12.24 STMICROELECTRONICS SRL
  • EP4124883B1 patent drawingFigure 1
  • EP4124883B1 patent drawingFigure 2
  • EP4124883B1 patent drawingFigure 3~4

AI summary

An apparatus (10), comprising: a laser light source (12) configured to transmit at least one beam of light pulses (L) towards a target, projecting at least one corresponding beam spot (P) thereon, and an array of sensors (16) with a plurality of sensors (16ij) distributed according to a grid (G), a sensor (16ij) in the array of sensors (16) configured to sense a light pulse incident thereon in response to reflection of at least one light pulse (P) of the beam of light pulses (L) from a field of view, FOV, region (T) in the target, the sensor (16) of the array of sensors (16) further configured to provide a signal indicative of a time of incidence of at least one light pulse (R). A FOV region (T) of the array of sensors (16) is portioned into grid cells (gij) according to the grid (G). Each sensor (16i) in the array of sensors (16) is configured to sense at least one echo light pulse (R) reflected from a respective grid cell portion (gij) of the FOV region (T). The apparatus (10) comprises a beam steering arrangement (13, 14) configured to cyclically vary a direction of transmission of the beam of light pulses (L), projecting at least one light pulse (P) per grid cell (gij) in the portioned FOV region (T) of the array of sensors (16).