MEMS Lever Torque Amplifier for LiDAR Beam Steering

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Solution Overview

Problem

LiDAR systems in autonomous vehicles are expensive, large, and bulky, limiting their widespread adoption due to the need for multiple emitters to achieve accurate tracking over large ranges and fields-of-view.

Innovation Solution

A device and method for beam steering in LiDAR systems using a mirror, combdrive actuators, levers, and hinges to apply torque to a supporting beam, allowing for precise rotation of the reflective surface for improved light steering capabilities, integrated as microelectromechanical systems (MEMS) on a semiconductor substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision and field-of-view are improved, but device complexity, size, and cost increase

Engineering Contradiction:
Improvetracking accuracyVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent divides the reflective surface into multiple independently controllable segments or zones. By controlling different segments of the mirror separately, the system can achieve accurate beam steering and tracking without requiring multiple complete emitter systems, thus reducing overall device complexity while maintaining measurement precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a new dimension of control by enabling the reflective surface to rotate and tilt in multiple directions (pitch, roll, yaw axes). This multi-degree-of-freedom movement allows a single emitter system to cover large fields-of-view and achieve accurate tracking by changing the orientation of the reflective surface rather than using multiple emitters in different positions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision and field-of-view are improved, but the device becomes large and bulky

Engineering Contradiction:
Improvetracking accuracyVSAvoiddevice size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent merges the functions of multiple emitters into a single emitter system by using a single reflective surface that can be dynamically oriented in different directions. This consolidation reduces the overall device volume while maintaining the capability to track objects over large ranges and fields-of-view through the rotational and tilting movements of the unified mirror assembly.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Instead of expanding the device horizontally by adding multiple emitters, the patent expands the field-of-view and tracking capability vertically by introducing rotational and tilting movements in multiple dimensions. This allows a compact device to achieve the same measurement precision as a larger multi-emitter system.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If multiple emitters are used to achieve accurate tracking over large ranges and fields-of-view, then measurement precision and field-of-view are improved, but cost increases

Engineering Contradiction:
Improvetracking accuracyVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent merges multiple emitter functions into a single emitter system with a dynamically controllable reflective surface. This reduces the number of expensive emitter components required while achieving the same tracking accuracy and field-of-view through mechanical movement, thereby reducing manufacturing cost.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces a reflective surface as an intermediary component that replaces the need for multiple emitters. This intermediary element allows a single emitter to achieve the functionality of multiple emitters by redirecting and orienting the light beam dynamically, reducing component cost and simplifying manufacturing.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Adaptability or versatility

If a reflective surface is rotated and tilted to steer light, then beam steering capability and field-of-view are improved, but the device complexity increases

Engineering Contradiction:
Improvebeam steering capabilityVSAvoidmechanical complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent designs the reflective surface assembly to perform multiple functions through a single integrated mechanism. The same structural components that enable rotation for pitch control also facilitate tilting for roll and yaw control, making the system multi-functional and reducing overall mechanical complexity compared to separate control mechanisms for each degree of freedom.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent employs dynamic control mechanisms that allow the reflective surface to change its orientation in real-time. By using controllable motors and linkages that enable smooth rotation and tilting movements, the system achieves versatile beam steering capability while keeping the mechanical structure relatively simple through coordinated motion control.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables more compact and efficient beam steering, enhancing the scanning speed and field-of-view of LiDAR systems while reducing the complexity and cost associated with multiple emitters, thereby improving the reliability and effectiveness of autonomous vehicle navigation systems.

Implementation Method 1

The combdrive actuator is configured to apply a torque to the supporting beam

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

The hinge couples the lever with the supporting beam, wherein the hinge is configured to allow for articulated movement between the lever and the supporting beam

Methodology Applied
Scientific EffectArticulated movement: Hinge

Implementation Method 3

Light steering typically involves the projection of light in a pre-determined direction

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3685209B1A lever system for driving mirrors of a lidar transmitter
Publication Date: 2021.09.08 BEIJING VOYAGER TECH CO LTD
  • EP3685209B1 patent drawingFigure 1
  • EP3685209B1 patent drawingFigure 2
  • EP3685209B1 patent drawingFigure 3

AI summary

A lever is used to rotate a microelectromechanical systems (MEMS) mirror. The lever can be used to provide more torque from a vertical comb drive. The MEMS mirror can be part of an array of micro mirrors used for beam steering a laser in a Light Detection and Ranging (LiDAR) system for an autonomous vehicle.