MEMS Micro-Resonator Lid Electrode Layout for Vacuum Packaging
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Solution Overview
Problem
Microelectromechanical systems (MEMS) resonators face challenges in providing efficient, high-performance, and cost-effective drive and sense electrodes, as well as packaging that maintains or enhances their performance, particularly in maintaining a vacuum environment.
Innovation Solution
A micro-resonator design with a lid-integrated electrode configuration, where the electrode is vertically integrated into the lid of the resonator, allowing for compact form factor, high electrode density, and enhanced driving, sensing, and tuning capabilities, while supporting a vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If traditional separate electrode packaging is used, then electrode accessibility is improved, but device complexity and packaging size increase
Solution Approach 1:
The patent merges the electrode structure with the packaging lid by integrating electrodes directly into the lid material. This combination eliminates the need for separate electrode components and their associated connection structures, thereby reducing overall device complexity while maintaining electrode accessibility for drive and sense functions.
Solution Approach 2:
The lid structure serves multiple functions: it provides mechanical packaging protection, maintains vacuum sealing, and simultaneously acts as the electrode support structure. This multi-functionality reduces the number of separate components needed, simplifying the overall packaging structure while preserving all necessary electrode functions.
2Power
If vertically integrated lid electrodes are used, then electrode density and driving force are improved, but manufacturing precision requirements increase
Solution Approach 1:
The electrodes are pre-positioned and integrated into the lid structure during the lid fabrication process, before final assembly with the resonator. This preliminary integration ensures precise electrode positioning relative to the resonator cavity, maintaining high manufacturing precision while enabling the high electrode density needed for strong driving force.
Solution Approach 2:
The patent transitions from planar electrode arrangements to vertically oriented electrodes extending from the lid into the cavity. This dimensional change increases electrode density and enhances the electric field interaction with the resonator, thereby improving driving force without requiring larger lateral spacing that would compromise precision.
3Reliability
If vacuum sealing is maintained, then resonator performance is improved, but packaging complexity increases
Solution Approach 1:
The vacuum sealing function is merged with the lid structure by integrating sealing elements directly into the lid that contains the electrodes. This integration maintains the vacuum environment necessary for high-Q resonator performance while avoiding additional separate sealing components, thereby reducing packaging complexity.
Solution Approach 2:
The lid structure simultaneously provides mechanical support, electrode integration, and vacuum sealing functions. This multi-functionality eliminates the need for separate sealing mechanisms, maintaining resonator performance in a vacuum environment while keeping the packaging structure simple and unified.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The lid-integrated electrode configuration enables improved driving force, detection sensitivity, and tuning of the micro-resonator, facilitating wafer-scale and chip-scale integration and maintaining high-quality factor performance in a vacuum environment.
Implementation Method 1
The lid-integrated electrode is configured to one or more of drive, sense and tune mechanical movement of the MEMS resonator
Implementation Method 2
The lid-integrated electrode is configured to one or more of drive, sense and tune mechanical movement of the MEMS resonator
Data Source
AI summary
A micro-resonator employs a lid-integrated electrode to one or more of drive, sense and tune a vibrational resonant mode of a microelectromechanical systems (MEMS) resonator. The micro-resonator includes a lid attached to a base that provides a resonator cavity. The micro-resonator further includes the MEMS resonator extending from a surface of the base toward the lid within the resonator cavity. The lid-integrated electrode extends vertically from the lid into the resonator cavity toward the base. The vertically extending, lid-integrated electrode is positioned spaced from and adjacent to a side of the MEMS resonator to one or more of drive, sense and tune mechanical movement of the MEMS resonator.