MEMS Sensor Lid Potential Stabilization via Contact Portion
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Solution Overview
Problem
Electronic devices with silicon MEMS-based physical quantity sensors face instability due to potential fluctuations of components like the lid, affecting the characteristics of the functional elements.
Innovation Solution
An electronic device configuration that includes a reference potential terminal and a conductive member electrically connected via a contact portion, ensuring the potential of the conductive member is fixed, thereby stabilizing the characteristics of the functional element. This can be achieved through various arrangements such as a recess on the first member, a through-electrode, or anodic bonding between glass and silicon members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the lid and support constitute the cavity without potential fixation, then the device structure is simple, but the characteristics of the functional element fluctuate due to potential changes
Solution Approach 1:
A contact portion is introduced as an intermediary component to electrically connect the lid (conductive member) with the reference potential terminal. This contact portion acts as a mediator that fixes the potential of the lid to the reference potential, thereby stabilizing the characteristics of the functional element without fundamentally altering the overall cavity structure
Solution Approach 2:
The lid is electrically connected to the reference potential terminal through the contact portion, making the lid equipotential with the reference potential. This eliminates potential fluctuations between the lid and reference potential, ensuring stable characteristics of the functional element while maintaining structural simplicity
2Reliability
If a contact portion is added to electrically connect the conductive member with the reference potential terminal, then the potential stability is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The contact portion is merged with the support structure, integrating the electrical connection function into an existing component. This combination approach allows the contact portion to be formed during the same manufacturing process as the support, minimizing additional manufacturing steps while achieving potential stabilization
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides stabilized characteristics for the functional element by fixing the potential of the conductive member, enhancing design freedom and impact resistance while reducing device size and improving detection sensitivity and water resistance.
Implementation Method 1
the contact portion electrically connects the second member with the reference potential terminal
Implementation Method 2
anodic bonding between glass and silicon members
Data Source
AI summary
An electronic device includes a first member including a reference potential terminal; a second member placed on a first surface of the first member and having conductivity; and a functional element accommodated in a cavity surrounded by the first member and the second member, wherein the second member and the reference potential terminal are electrically connected via a contact portion.