MEMS LiDAR Galvanometer ROI Scanning for Higher Vertical Resolution

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Solution Overview

Problem

LiDAR based on MEMS micro galvanometer technology struggles with achieving precise scanning and uniform resolution in ROI regions, failing to meet accurate detection requirements.

Innovation Solution

Control the slow axis scanning speed of the micro galvanometer to adjust the resolution in ROI regions by reducing the speed when scanning within the ROI and increasing it when leaving the ROI, thereby enhancing vertical resolution in the ROI region.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the micro galvanometer scans at a constant speed, then the scanning is simple and fast, but the resolution in ROI regions is insufficient and uniform scanning cannot meet accurate detection requirements

Engineering Contradiction:
Improvedetection resolutionVSAvoidscanning speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent applies dynamics by making the scanning speed variable rather than constant. The micro galvanometer's scanning speed is dynamically adjusted based on the beam's position relative to the ROI region. When the beam is in the ROI region, the scanning speed is reduced to increase resolution; when outside the ROI region, the scanning speed is increased to improve overall scanning efficiency. This dynamic speed adjustment resolves the contradiction between maintaining high scanning speed and achieving high detection resolution in specific regions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent applies local quality by creating different scanning resolutions for different spatial regions. The ROI region receives enhanced scanning resolution through reduced scanning speed, while non-ROI regions maintain faster scanning speeds. This local differentiation allows the system to concentrate measurement precision where needed (in the ROI region) without sacrificing overall scanning productivity, effectively resolving the contradiction between uniform resolution and scanning efficiency.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the scanning speed is reduced to improve resolution in ROI regions, then the detection precision increases, but the overall scanning time increases

Engineering Contradiction:
Improvevertical resolution in ROIVSAvoidscanning period
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies local quality by applying different scanning speeds to different spatial regions. The reduced scanning speed (and thus increased resolution) is applied only within the ROI region boundaries, while faster scanning speeds are maintained in non-ROI regions. This localized approach ensures that time is spent at high resolution only where necessary, minimizing the overall time loss while maximizing detection precision in the critical ROI region.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent applies partial action by reducing the scanning speed only partially and only in specific regions (ROI) rather than uniformly across the entire scanning area. The speed reduction is applied selectively during the time intervals when the beam is within the ROI region, allowing the system to achieve enhanced resolution where needed without unnecessarily extending the total scanning period for the entire field of view.

Inventive Principle:
Principle #16Partial or excessive action

3Measurement precision

If the micro galvanometer scans uniformly across the entire field of view, then the scanning process is simple, but it cannot effectively control the resolution of specific ROI regions

Engineering Contradiction:
ImproveROI region resolutionVSAvoidscanning control complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies feedback by continuously monitoring the beam's angular position relative to the ROI region boundaries and using this information to dynamically adjust the scanning speed. The control system receives feedback about the current scanning position and automatically modifies the scanning parameters accordingly. This feedback mechanism enables precise control of resolution in ROI regions without requiring complex manual intervention or system redesign, resolving the contradiction between measurement precision and device complexity.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent applies dynamics by implementing a dynamic scanning control system that automatically adjusts scanning parameters based on real-time position feedback. The transition from uniform static scanning to dynamic adaptive scanning is achieved through programmed control logic that responds to position feedback, enabling ROI-specific resolution control without proportionally increasing overall system complexity.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves vertical resolution in the ROI region by densifying scanning within the ROI and reducing it outside, allowing for accurate and efficient scanning of critical areas.

Implementation Method 1

as the micro galvanometer vibrates, the detection laser light deflects on a surface of the micro galvanometer to form a field of view

Methodology Applied
Scientific EffectLight reflection and deflection: Reflection

Data Source

PatentUS12529765B2Method and device for controlling micro galvanometer of solid-state LiDAR and solid-state LiDAR
Publication Date: 2026.01.20 SUTENG INNOVATION TECHNOLOGY CO LTD
  • US12529765B2 patent drawing
  • US12529765B2 patent drawing
  • US12529765B2 patent drawing

AI summary

The present application discloses a method and a device for controlling a micro galvanometer of a solid-state LiDAR, and a solid-state LiDAR. The method includes acquiring a vertical angle range of a field of view scanned by the solid-state LiDAR, determining a first vertical angle of the field of view and a second vertical angle of the field of view corresponding to a preset ROI region of the solid-state LiDAR, reducing a slow axis scanning speed of the micro galvanometer to a first preset speed when it is monitored that the micro galvanometer scans the first vertical angle of the field of view, and adjusting the slow axis scanning speed of the micro galvanometer to a second preset speed when it is monitored that the micro galvanometer scans the second vertical angle of the field of view.